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US 8,801,894 B2Granted
Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers
AssigneeMicron Technology, Inc.
InventorDan B. Millward
Life of this patent
Estimating the term…
Abstract
Methods for fabricating sub-lithographic, nanoscale microchannels utilizing an aqueous emulsion of an amphiphilic agent and a water-soluble, hydrogel-forming polymer, and films and devices formed from these methods are provided.
Claims26
A template for etching a substrate, comprising:
- a cross-linked hydrogel within a trench in a material on the substrate, the cross-linked hydrogel formed from a water-soluble polymer and spaced from sidewalls of the trench by an elongate gap exposing the substrate at a floor of the trench.
A template for etching a substrate, comprising:
- a cross-linked hydrogel situated within a trench in a material on the substrate, the cross-linked hydrogel formed from a water-soluble polymer, the trench having hydrophobic sidewalls and a hydrophilic floor, the cross-linked hydrogel spaced from the hydrophobic sidewalls of the trench by an elongate gap exposing the substrate at the hydrophilic floor of the trench.
A template for etching an oxide substrate, comprising:
- a cross-linked hydrogel within a trench in a silicon material on the oxide substrate, the cross-linked hydrogel formed from a water-soluble polymer, the trench having hydrophobic sidewalls and a hydrophilic floor, the cross-linked hydrogel spaced from the hydrophobic sidewalls of the trench by an elongate gap exposing the oxide substrate at the hydrophilic floor of the trench.
A template for etching a substrate, comprising:
- a cross-linked hydrogel within a trench in a material on the substrate, the cross-linked hydrogel derived from a water-soluble polymer, the cross-linked hydrogel and sidewalls of the trench defining therebetween a pair of linear channels adjacent the sidewalls and extending a length of the trench, the substrate at a floor of the trench exposed in the pair of linear channels, each of the linear channels of the pair of linear channels being up to about 10 nm wide.
A template for etching a substrate, comprising:
- a first trench in a material overlying a substrate;
- and
- a plurality of polymer lines, the polymer lines separated from one another by openings distributed across a width of the first trench and extending a length of the first trench, the openings exposing second trenches in the substrate.
A template for etching a substrate, comprising:
- an inorganic material within a trench in another material on a substrate, the inorganic material spaced from at least one sidewall of the trench by an elongate gap having a width up to about 10 nm, the elongate gap exposing the substrate at a floor of the trench.
Dependencies are inferred from the claim text.