Method and system for high-throughput deposition of patterned organic thin films
AssigneeUniversal Display Corporation
InventorsPaul E. Burrows, Jeffrey Silvernail, Julie J. Brown
Life of this patent
Estimating the term…
Abstract
High-throughput OVJP systems and methods are provided that may use multiple flow paths having different conductances to enable deposition with relatively short lag times. A high-throughput OVJP system may include a flow tube having a cross-sectional area much larger than the diameter of one or more apertures through which source material may be expelled during deposition. Use of such a configuration may allow for deposition with reduced lag times.
Claims25
A device comprising:
- an enclosure having a first end, a second end, and at least one aperture disposed between the first end and the second end;
- a source of organic molecules in fluid communication with the enclosure;
- a source of carrier gas in fluid communication with the source of organic molecules;
- a bypass valve;
- a first flow path from the organic source through the bypass valve, the first flow path having a first conductance;
- and
- a second flow path from the organic source through the at least one aperture, the second flow path having a second conductance;
- the first conductance being at least 100 times the second conductance when the bypass valve is open.
A method of operating an organic vapor jet printing system having an enclosure, an organic source, a bypass valve, and at least one aperture disposed between the organic source and the bypass valve in the enclosure, the method comprising:
- opening the bypass valve to cause the carrier gas flow to transport organic material from the organic source through a first flow path from the source through the bypass valve, the first flow path having a first conductance when the bypass valve is open;
- and
- closing the bypass valve to cause the carrier gas flow to transport organic material through a second flow path from the source through the at least one aperture, the second flow path having a second conductance;
- the first conductance being at least 100 times the second conductance.
Dependencies are inferred from the claim text.