Array of abrasive members with resilient support

A method of lapping or cleaning a surface of a substrate, the method comprising the steps of:

• creating air bearing features on first surfaces of a plurality of abrasive members;
• coupling second surfaces of the abrasive members to a elastomeric support that permits each abrasive member to move independently in at least pitch and roll;
• positioning preload mechanisms to bias the first surfaces of the abrasive members toward the substrate;
• positioning abrasive features at an interface of the first surfaces of the abrasive members and the substrate;
• and
• moving the abrasive article relative to the substrate to create hydrodynamic forces that maintain leading edges of the abrasive members further away from the substrate than trailing edges to lap or clean the substrate.

An abrasive article for polishing a surface of a substrate, the abrasive article comprising:

• a resilient support;
• a plurality of discrete abrasive members coupled to the resilient support so that each abrasive member is adapted to move substantially independently in at least pitch and roll relative to the resilient support;
• a preload mechanism adapted to apply a biasing force to each of the abrasive members to bias first surfaces of the abrasive members toward the substrate;
• one or more air bearing features on the first surfaces of the abrasive members configured to generate hydrodynamic forces during motion of the abrasive article relative to the substrate;
• and
• abrasive features located at an interface of the first surfaces of the abrasive members adapted to polish the substrate in the presence of the hydrodynamic forces.