Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
AssigneeNikon Corporation
InventorTohru Kiuchi
Life of this patent
Estimating the term…
Abstract
In order to provide a substrate cartridge, a substrate processing apparatus, a substrate processing system, a control apparatus, and a method of manufacturing a display element capable of preventing foreign objects from being attached to the substrate, there is provided a substrate cartridge including: a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening; a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion; and a blocking unit that blocks the opening depending on a connection state between the mount portion and an external connecting portion.
Claims57
A substrate cartridge adapted to accommodate a flexible strip-like sheet substrate for forming an electric circuit thereon, the substrate cartridge comprising:
- a cartridge mainframe that has
- an opening which extends in a widthwise direction of the substrate and through which the substrate is carried in/out in a striped direction of the substrate;
- a roller which is provided to be rotatable around a center axis along the widthwise direction and to wind up the substrate in the striped direction to accommodate the substrate in a roll shape;
- and
- a cap member which is movable provided to open or close the opening;
- a mount portion which is provided to the cartridge mainframe and is detachably connected to an external connecting portion of a processing apparatus of the substrate;
- and
- a switching mechanism which switches the cap member to an opened state when the mount portion is connected to the external connecting portion and switches the cap member to a closed state when the mount portion is detached from the external connecting portion.
A substrate cartridge adapted to accommodate a flexible strip-like sheet substrate for forming an electric circuit thereon, the substrate cartridge comprising:
- a cartridge mainframe that has
- an opening which extends in a widthwise direction of the substrate and through which the substrate is carried in/out in a striped direction of the substrate;
- a roller which is provided to be rotatable around a center axis along the widthwise direction and to wind up the substrate in the striped direction to accommodate the substrate in a roll shape;
- and
- a clamp mechanism which is movably provided within the opening clamps or releases the substrate;
- and
- a mount portion which is provided to the cartridge mainframe and is detachably connected to an external connecting portion of a processing apparatus of the substrate,
- wherein the clamp mechanism clamps the substrate and closes the opening when the mount portion is detached from the external connection portion, and releases the substrate and opens the opening when the mount portion is connected to the external connecting portion.
Dependencies are inferred from the claim text.