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US 8,801,152 B2Granted
Piezoelectric element, piezoelectric actuator, liquid ejecting head, liquid ejecting apparatus, and method for producing piezoelectric element
AssigneeSeiko Epson Corporation
InventorMasao Nakayama
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Abstract
A piezoelectric element includes a substrate; a first conductive layer disposed on or above the substrate; a piezoelectric layer covering a top and a side of the first conductive layer; a relaxing layer disposed on or above the piezoelectric layer and along an edge of a top surface of the piezoelectric layer; and a second conductive layer covering at least the relaxing layer and the piezoelectric layer.
Claims1
A method for producing a piezoelectric element, comprising:
- forming a first conductive layer on or above a substrate;
- forming a piezoelectric layer on or above the first conductive layer;
- forming a relaxing layer on or above the piezoelectric layer;
- performing first patterning in which the relaxing layer and the piezoelectric layer are patterned;
- performing second patterning in which the patterned relaxing layer is further patterned;
- and
- forming a second conductive layer on or above the piezoelectric layer and the relaxing layer,
- wherein, in the second patterning, the relaxing layer is patterned so as to extend along an edge of a top surface of the piezoelectric layer.
5 more elements
Dependencies are inferred from the claim text.