Robot edge contact gripper

An end effector for a substrate transport, the end effector comprising:

• a base portion;
• a substrate holding portion having a proximate end and a distal end, a longitudinal axis extending between the proximate end and distal end, and at least one rest pad, the substrate holding portion being coupled to the base portion a the proximate end and extending from the base portion;
• an active contact member assembly disposed at the proximate end of the substrate holding portion, the active contact member assembly including a pusher member, a contact member and a rotatable coupling member that are reciprocably movable towards the distal end of the substrate holding portion for gripping a substrate on the substrate holding portion, the contact member being movably secured to the pusher member by the rotatable coupling member such that a center axis of the rotatable coupling member is aligned with an axis of the pusher member and being configured to contact the substrate for urging the substrate against the at least one rest pad and to rotate about the center axis of the rotatable coupling member in response to rotation of the substrate during gripping and while in substantial contact with the substrate where the center axis of the rotatable coupling member is substantially along the longitudinal axis.

An end effector for a substrate transport having a longitudinal axis extending between a distal and a proximate end of the end effector, the end effector comprising:

• a substrate support having at least two substrate rest pads for supporting a peripheral edge of a substrate;
• and
• an active contact member reciprocably moveable along the longitudinal axis and configured to urge the substrate against the at least two substrate rest pads, the active contact member having a pusher member and a rotatable member rotatably coupled to the pusher member, the rotatable member being configured to contact the substrate allowing relative movement between the active contact member and the substrate while in substantial contact with the substrate so that the substrate can pivot about one of the at least two substrate rest pads during gripping of the substrate and an axis of rotation of the rotatable member is aligned with an axis of the pusher member.