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US 8,800,998 B2Granted
Semiconductor wafer isolated transfer chuck
AssigneeMultiprobe, Inc.
InventorsAndrew N. Erickson, Jeffrey M. Markakis, Anton L. Riley
Life of this patent
Estimating the term…
Abstract
A semiconductor wafer processing tool has a support structure for a coarse motion positioning system. A measurement head having a rigid super structure is supported from the support structure by vibration isolators and a top plate is mounted to the super structure. A vacuum transfer chuck is releasably carried by the coarse motion positioning system and releasably adherable to the top plate by application of vacuum. The vacuum transfer chuck supports a semiconductor wafer.
Claims8
A system for isolation of a semiconductor water test tool comprising:
- a measurement head having a rigid super structure which is supported from a tool support structure by vibration isolators, said super structure further having kinematic positioning elements;
- a top plate mounted to the super structure having an underside vacuum surface;
- a vacuum transfer chuck having a vacuum ring surface releasably adherable to the top plate underside vacuum surface by application of vacuum, said vacuum transfer chuck supporting a semiconductor wafer.
Dependencies are inferred from the claim text.