Method and apparatus for a pressure measuring cell
AssigneeVEGA Grieshaber KG
InventorsThomas Kopp, Jörn Jacob, Martin Mellert, Josef Fehrenbach, Thomas Deck
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Abstract
The invention is for a method and apparatus for a pressure measuring cell for measuring a metered pressure, with a base body having at least one base body electrode and with a membrane body connected to the base body to form a sensor chamber, which has at least one membrane electrode and can be subjected to the pressure of a medium that is below the measurement pressure, wherein both the wall of the sensor chamber that is formed by the base body and the wall of the sensor chamber that is formed by the membrane body is covered with a protective layer; according to the invention, the protective layer is fashioned as a glass layer.
Claims11
A pressure measuring cell for measuring a metered pressure, said pressure measuring cell comprising:
- (a) a base body, said base body having at least one base body electrode;
- (b) a membrane body connected to said base body to form a sensor chamber, said sensor chamber comprising at least one membrane electrode which is capable of being subjected to a pressure of a medium that is below a measurement pressure;
- (c) a first wall of said sensor chamber, said first wall formed by said base body;
- and
- (d) a second wall that is formed by said membrane body;
- and
- (i) wherein at least one of said first wall and said second wall is coated with a protective layer so as to minimize any negative electrical effects from a build-up of water molecules thereon;
- and
- (ii) wherein said protective layer is fashioned as a glass layer;
- wherein said protective layer covers an entire surface of said base body on which said at least one base body electrode is formed and covers an entire surface of said membrane body on which said at least one membrane electrode is formed;
- and
- wherein said base body and said membrane body are joined together at a margin by a spacing holder produced as glass solder.
A pressure measuring cell for measuring a metered pressure, said pressure measuring cell comprising:
- (a) a base body, said base body further comprising:
- (i) at least one base body electrode;
- and
- (ii) a glass layer, said glass layer covering an entire surface of said base body;
- (b) a membrane body connected to said base body to form a sensor chamber, said sensor chamber comprising at least one membrane electrode which is capable of being subjected to a pressure of a medium that is below a measurement pressure;
- (c) a first wall located within the interior of said sensor chamber, said first wall formed by said base body;
- and
- (d) a second wall that is formed by said membrane body;
- and
- (i) wherein at least one of said first wall and said second wall is coated with a protective layer so as to minimize any negative electrical effects from a build-up of water molecules thereon;
- and
- (ii) wherein said protective layer is fashioned as a glass layer;
- wherein said protective layer covers an entire surface of said membrane body on which said at least one membrane electrode is formed;
- and
- wherein said base body and said membrane body are joined together at a margin by a spacing holder produced as glass solder.
A method of measuring a metered pressure involving a pressure measuring cell, said method comprising the steps of:
- (a) providing a base body, said base body further comprising:
- (i) at least one base body electrode;
- and
- (ii) a glass layer;
- (b) providing a membrane body connected to said base body, said membrane body and said base body forming a sensor chamber therewith, and said sensor chamber comprising at least one membrane electrode which is capable of being subjected to a pressure of a medium that is below a measurement pressure;
- (c) providing a first wall located within the interior of said sensor chamber, said first wall formed by said base body;
- and
- (d) providing a second wall that is formed by said membrane body;
- (e) coating at least one of said first wall and said second wall with a protective layer so as to minimize any negative electrical effects from a build-up of water molecules thereon;
- and
- (f) joining together at a margin said base body and said membrane body by a spacing holder produced as glass solder;
- wherein said protective layer is fashioned as a glass layer;
- and
- wherein said protective layer covers an entire surface of said base body on which said at least one base body electrode is formed and covers an entire surface of said membrane body on which said at least one membrane electrode is formed.
A method of manufacturing a metered pressure involving a pressure measuring cell, said method comprising the steps of:
- (a) providing a base body, said base body further comprising:
- (i) at least one base body electrode;
- and
- (ii) a glass layer, said glass layer covering an entire surface of said base body;
- (b) providing a membrane body connected to said base body, said membrane body and said base body forming a sensor chamber therewith, and said sensor chamber comprising at least one membrane electrode which is capable of being subjected to a pressure of a medium that is below a measurement pressure;
- (c) providing a first wall located within the interior of said sensor chamber, said first wall formed by said base body;
- (d) providing a second wall that is formed by said membrane body;
- (e) coating at least one of said first wall and said second wall with a protective layer so as to minimize any negative electrical effects from a build-up of water molecules thereon;
- wherein said protective layer is fashioned as a glass layer;
- (f) covering said surface of said membrane body on which said membrane electrode is formed with said glass layer;
- and
- (g) joining together at a margin said base body and said membrane body by a spacing holder produced as glass solder.
Dependencies are inferred from the claim text.