Method of making a modular multichannel microelectrode array

A method of making a neuroprobe system, comprising the steps of:

• providing a carrier;
• providing a flexible planar microelectrode array including:
• providing a substrate including a plurality of conductive interconnects disposed on the substrate and disposed between layers of dielectrics;
• forming a plurality of electrode sites on the substrate such that at least some electrode sites are in contact with a corresponding interconnect, and
• forming a plurality of bond pads, at least some of which are in contact with a respective interconnect;
• folding the planar microelectrode array;
• and
• coupling the planar microelectrode array to the carrier.