Calibration method for radio frequency scattering parameter measurement applying three calibrators and measurement structure thereof

A measurement structure for radio frequency scattering parameter measurement applying three calibrators which uses a microwave probe as a contact interface for microwave signal transmissions, wherein the microwave probe includes at least a ground end and a signal end, and the measurement structure for radio frequency scattering parameter measurement applying three calibrators comprises:

• a transmission line segment calibrator, in which the microwave probe contacts the transmission line segment calibrator, and the transmission line segment calibrator consists of two transmission lines and a transmission line segment, in which the transmission line segment is connected between the two transmission lines, and the transmission lines are connected to the signal end of the microwave probe thereby performing measurements on device characteristics of the transmission line segment;
• an offset series device calibrator, in which the microwave probe contacts the offset series device calibrator, and the offset series device calibrator consists of two transmission lines, an offset transmission line and a series resistor, in which the offset transmission line and the series resistor are connected between the two transmission lines, and the transmission lines are connected to the signal end of the microwave probe;
• an offset shunt device calibrator, in which the microwave probe contacts the offset shunt device calibrator, and the offset shunt device calibrator consists of two transmission lines, an offset transmission line and a shunt resistor, in which the offset transmission line and the shunt resistor are connected between the two transmission lines, and the transmission lines are connected to the signal end of the microwave probe;
• and
• a tested object measuring instrument, in which the microwave probe contacts the tested object measuring instrument, and the tested object measuring instrument consists of two transmission lines and a tested device, in which the tested device is connected between the two transmission lines and the transmission lines are connected to the signal end of the microwave probe thereby performing measurements on device characteristics of the tested device.