Detector modules and methods of manufacturing

An imaging system comprising:

• an x-ray source for generating x-rays;
• a detector for detecting x-rays generated by the x-ray source after passing through an object, the detector comprising a plurality of modules having detector elements formed from (i) a silicon wafer having a first layer with a first resistivity and a second layer having a second resistivity, wherein the first resistivity is greater than the second resistivity, (ii) a photosensor device provided with the first layer on a first side of the silicon wafer and (iii) one or more readout electronics provided with the second layer on a second side of the silicon wafer, the first side being a different side than the second side, wherein digital signals are output from the detector elements;
• and
• a processor for reconstructing an image of the object using the digital signals.

A method for forming a detector module, the method comprising:

• fabricating a photosensor array on a first side of a silicon wafer, wherein the silicon wafer comprises a plurality of layers each having a different resistivity;
• fabricating readout electronics on a second side of the silicon wafer opposite the first side;
• and
• forming a conductive via through the silicon wafer interconnecting the photosensor array and the readout electronics.