Variable wavelength interference filter, optical module, and optical analysis device
AssigneeSeiko Epson Corporation
InventorsTomonori Matsushita, Yasushi Matsuno
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AssigneeSeiko Epson Corporation
InventorsTomonori Matsushita, Yasushi Matsuno
Estimating the term…
A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.
A wavelength-variable interference filter comprising:
A wavelength-variable interference filter comprising:
Dependencies are inferred from the claim text.