Actuator, method for manufacturing actuator, and optical scanner
AssigneeSeiko Epson Corporation
InventorYasushi Mizoguchi
Life of this patent
Estimating the term…
Abstract
An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.
Claims14
An actuator comprising:
- a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion;
- an insulating layer provided on a surface of the base;
- and
- a conductive portion having conductivity and provided on the insulating layer,
- wherein in a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to one end of the connection portion, and an edge that connects an edge of the support portion to another end of the connection portion, the one end is disposed closer to the movable portion than the another end the another end is disposed closer to the support portion than the one end.
A method for manufacturing an actuator, the method comprising:
- forming an insulating layer on a surface of a silicon substrate;
- forming a conductive portion on the insulating layer;
- and
- forming a base including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion by etching and then planarizing the silicon substrate,
- wherein in the formation of the insulating layer, in a plan view of the base viewed in a thickness direction of the base, the insulating layer is formed on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to one end of the connection portion, and an edge that connects an edge of the support portion to another end of the connection portion, the one end is disposed closer to the movable portion than the another end, and the another end is disposed closer to the support portion than the one end.
An optical scanner comprising:
- a base made of silicon and including a movable portion capable of oscillating around an oscillation axis and including a light reflecting portion having light reflectivity, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion;
- an insulating layer provided on a surface of the base;
- and
- a conductive portion having conductivity and provided on the insulating layer,
- wherein in a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to one end of the connection portion, and an edge that connects an edge of the support portion to another end of the connection portion, the one end is disposed closer to the movable portion than the another end, the another end is disposed closer to the support portion than the one end.
Dependencies are inferred from the claim text.