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US 8,797,623 B2Granted
Method and device for scanning light
AssigneeScaneva Ltd.
InventorsYizhar Weiss, Mordekhai Velger, Sivan Natan-Knaz, Raviv Erlich, Alexander Sromin
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Abstract
A method of scanning a light beam is disclosed. The method comprises scanning the light beam along a first axis and scanning the light beam along a second axis, such that a functional dependence of the scanning along the first axis is substantially a step-wave, and a functional dependence of the scanning along the second axis is other than a step-wave.
Claims20
A method for scanning a light beam, comprising:
- directing the light beam to reflect from at least one micromirror in a microelectromechanical system (MEMS);
- and
- driving the MEMS so as to cause the at least one micromirror to rotate resonantly about a first axis and to cause the at least one micromirror to rotate non-resonantly in a step-wave about a second axis.
A device for scanning a light beam, comprising:
- a microelectromechanical system (MEMS), comprising at least one micromirror;
- a light source, configured to direct the light beam to reflect from at least one micromirror;
- and
- a drive, which is coupled to the MEMS so as to cause the at least one micromirror to rotate resonantly about a first axis and to cause the at least one micromirror to rotate non-resonantly in a step-wave about a second axis.
1 more element
Dependencies are inferred from the claim text.