Apparatus for generating three-dimensional image of object

A scanning apparatus for generating a three-dimensional image of a surface of an object to be measured, comprising:

• a laser source for emitting a laser light;
• a first optical unit for irradiating the laser light emitted from the laser source towards the surface of the object;
• a second optical unit for imaging the laser light reflected from the surface of the object;
• a photosensitive detector having a plurality of sensor elements, for detecting an imaging position of the laser light from the second optical unit;
• an incident light measurement device for measuring an amount of received laser light, which corresponds to the amount of laser light entering the photosensitive detector;
• and
• a processing unit for controlling the scanning apparatus in such a way, that:
• a plurality of timing signals are generated having a predetermined time interval;
• the timing signals control a reset timing of a sensor element of the photosensitive detector;
• a certifying laser light is irradiated from the laser source after one timing signal for a period of time shorter than the predetermined time interval;
• an amount of the certifying laser light reflected from the surface of the object is measured with the incident light measurement device;
• and
• an amount of the measurement laser light emitted from the laser source is determined dependent on the amount of the certifying laser light measured with the incident light measurement device.