Interferometric distance measurement device using a scanning plate and transparent carrier substrate containing a reflector element

An interferometric distance measurement device, comprising:

• a light source that emits a beam of light;
• a scanning unit comprising a scanning plate, which includes a splitter that splits the beam of light into at least a measurement beam and a reference beam, wherein said reference beam is propagated solely within said scanning plate before reaching interferential superposition with said measurement beam at a unification site;
• a reflector, spaced apart from said scanning unit, which is acted upon by said measurement beam, wherein said reflector is embodied such that said measurement beam striking said reflector undergoes retroreflection in at least one direction, so that said reference beam and said measurement beam maintain their relative propagation directions, regardless of any possible relative tilting of said scanning unit and of said reflector downstream of said unification site, wherein said reflector comprises a lens element and a reflector element, and in said reflector said lens element is disposed on one side of a transparent carrier substrate, which faces toward said scanning plate, and wherein said reflector element is disposed on an opposite side of said transparent carrier substrate, and a reflective side of said reflector element is oriented in a direction of said lens element;
• and
• a detector arrangement by way of which at least one distance signal relating to a distance between said scanning plate and said reflector is detectable from said measurement beam and said reference beam interfering with one another.