Optical system polarizer calibration
AssigneeKLA-Tencor Corporation
InventorsJohannes D. de Veer, Leonid Poslavsky, G. Vera Zhuang, Shankar Krishnan
Life of this patent
Estimating the term…
Abstract
An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence. The apparatus decouples the polarization effect of the system from the polarization effect of the sample. The apparatus includes a substrate with a polarizer disposed on the surface. An indicator on the substrate indicates the polarization orientation of the polarizer, which is in a predetermined orientation with respect to the substrate.
Claims20
An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence, by decoupling a polarization effect of the system from a polarization effect of a sample, the apparatus comprising a substrate having a polarizer disposed on a surface thereof, with an indicator on the substrate for indicating a polarization orientation of the polarizer, where the polarization orientation is in a predetermined orientation with respect to the substrate, and the polarizer configured to exhibit substantially complete extinction of system light in one orientation and substantially no absorption of system light in another orientation.
An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence, by decoupling a polarization effect of the system from a polarization effect of a sample, the apparatus comprising a polarizer formed by patterning a lithographic polarizer directly on a substrate surface, with an indicator on the substrate for indicating a polarization orientation of the polarizer, where the polarization orientation is in a predetermined orientation with respect to the substrate, and the polarizer configured to exhibit substantially complete extinction of system light in one orientation and substantially no absorption of system light in another orientation.
An apparatus to calibrate a polarizer in a polarized optical system at any angle of incidence, by decoupling a polarization effect of the system from a polarization effect of a sample, the apparatus comprising a polarizer disposed on a substrate surface, the polarizer formed of an etched grating layer formed in a metal layer on the substrate, with a notch in the edge of the substrate for indicating a polarization orientation of the polarizer, where the polarization orientation is in a predetermined orientation with respect to the substrate, and the polarizer configured to exhibit substantially complete extinction of system light in one orientation and substantially no absorption of system light in another orientation.
Dependencies are inferred from the claim text.