Pattern inspection apparatus and pattern inspection method
AssigneeNuFlare Technology, Inc.
InventorRiki Ogawa
Life of this patent
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Abstract
A pattern inspection apparatus in accordance with one aspect of the present invention includes a laser light source configured to emit a laser light, an integrator lens configured to input the laser light, and form a light source group by dividing the laser light inputted, a scattering plate, arranged at a front side of an incident surface of the integrator lens, configured to scatter the laser light which is to enter the integrator lens, and an inspection unit configured to inspect a defect of a pattern on an inspection target object where a plurality of figure patterns are formed, by using the laser light having passed through the integrator lens as an illumination light.
Claims20
A pattern inspection apparatus comprising:
- a laser light source configured to emit a laser light;
- an integrator lens configured to input the laser light, and form a light source group by dividing the laser light inputted;
- a scattering plate, arranged between the integrator lens and the laser light source, configured to scatter the laser light which is to enter the integrator lens;
- and
- an inspection unit configured to inspect a defect of a pattern on an inspection target object where a plurality of figure patterns are formed, by using the laser light having passed through the integrator lens as an illumination light.
A pattern inspection method comprising:
- emitting a laser light from a laser light source;
- scattering the laser light, which is to enter an integrator lens, by letting the laser light pass through a scattering plate arranged between an integrator lens that forms a light source group by dividing the laser light, and the laser light source;
- inputting a scattered laser light into the integrator lens and dividing an input laser light to form the light source group;
- and
- inspecting a defect of a pattern on an inspection target object where a plurality of figure patterns are formed, by using the laser light having passed through the integrator lens as an illumination light.
Dependencies are inferred from the claim text.