Deformation measuring apparatus and deformation measuring method
AssigneeCanon Kabushiki Kaisha
InventorTakashi Sugimoto
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Abstract
An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.
Claims6
A method for measuring, from an amount of phase change of an interference pattern generated by irradiating an object to be measured with light, an amount of deformation of the object, the method comprising:
- causing two laser beams to be incident on the object;
- detecting a first speckle interference pattern generated by an interference of scattering lights of the two laser beams;
- detecting a second speckle interference pattern generated by modulating an optical path length of at least one laser beam out of the two laser beams;
- obtaining a speckle interference fringe image having a carrier fringe calculated based on difference between the first and the second speckle interference patterns;
- obtaining a phase of the speckle interference fringe image including a phase corresponding to the deformation of the object and a phase of a spatial carrier fringe;
- unwrapping the phase of the speckle interference fringe image;
- and
- calculating an amount of deformation of the object based on phase information corrected by the phase unwrapping,
- wherein a method for the modulating an optical path length of the laser beam includes causing a plane parallel transparent plate, arranged on an optical path where either one of the two laser beams becomes diverging light and at a position where the plane parallel transparent plate transmits said either one of the two laser beams, to tilt relative to the optical path.
An apparatus that measures, from an amount of phase change of interference pattern generated by irradiating an object to be measured with light, an amount of deformation of the object, the apparatus comprising:
- a laser beam source;
- an optical system configured to guide two laser beams each from the laser beam source to the object;
- a mechanism configured to modulate an optical path length of at least one of the two laser beams;
- a detector configured to detect scattering light of a laser beam irradiated on the object;
- and
- a computer configured to calculate an amount of deformation based on speckle interference patterns detected by the detector,
- wherein the amount of deformation of the object is calculated, by:
- obtaining a speckle interference fringe image having a carrier fringe calculated based on difference between the first and the second speckle interference patterns,
- obtaining a phase of the speckle interference fringe image including a phase corresponding to the deformation of the object and a phase of a spatial carrier fringe,
- unwrapping the phase of the speckle interference fringe image, and
- calculating an amount of deformation of the object based on phase information corrected by the phase unwrapping,
- wherein the mechanism is a mechanism for causing a plane parallel transparent plate, arranged on an optical path where either one of the two laser beams becomes a diverging light and at a position where the plane parallel transparent plate transmits said either one of the two laser beams, to tilt relative to the optical path.
Dependencies are inferred from the claim text.