Appearance inspection apparatus

An appearance inspection apparatus having conveying means for conveying an inspection object on a predetermined conveying surface in a conveyance direction for conveying the inspection object and surface shape inspecting means for inspecting the surface shape of the inspection object being conveyed by the conveying means, wherein

• the surface shape inspecting means comprises:
• a slit beam irradiating section disposed in the vicinity of the conveying means for irradiating a band-shaped slit beam on the surface of the inspection object in such a manner that the slit beam is radiated vertically to the conveying surface and the irradiation line of the slit beam is orthogonal to the conveyance direction;
• an area sensor camera for capturing images of the slit beam irradiated on the surface of the inspection object;
• a first optical mechanism which has an optical path for receiving a reflected light of the slit beam irradiated on a portion of the surface of the inspection object on the downstream side in the conveyance direction, and guiding the reflected light to the area sensor camera;
• a second optical mechanism which has an optical path for receiving a reflected light of the slit beam on the same portion of the surface of the inspection object on the upstream side in the conveyance direction and guiding the reflected light to the area sensor camera;
• and
• a shape judging section for recognizing shape features of the surface of the inspection object on the basis of the images captured by the area sensor camera and judging appropriateness of the shape of the surface of the inspection object, wherein:
• each of the first and second optical mechanisms has
• a first mirror which has a reflective surface disposed along the axial direction of a first axis orthogonal to the conveyance direction and parallel to the conveying surface, and receives a reflected light of the slit beam irradiated on the surface of the inspection object with the reflective surface and reflects it,
• a second mirror which has a reflective surface disposed along the axial direction of a second axis orthogonal to the conveying surface, and receives the light reflected by the first mirror and reflects it,
• a third mirror which has a reflective surface disposed along the conveyance direction, and receives the light reflected by the second mirror and reflects it to guide the reflected light to the area sensor camera,
• a first angle adjusting section for rotating the respective first mirror about an axis parallel to the first axis, and
• a second angle adjusting section for rotating the respective second mirror about an axis parallel to the second axis;
• the optical paths of the first and second optical mechanisms are for forming images of the reflected lights within a band region in an image forming portion region of the area sensor camera in a state where they are aligned laterally, the band region having a width smaller than that of the image forming portion region in a column direction orthogonal to a line direction which is a raster direction;
• and
• the area sensor camera is configured to scan data of each of the images formed within the band region and output the data to the shape judging section.