High-voltage charge pump

A charge pump system, comprising:

• a plurality of charge pump stages coupled together;
• wherein each of the stages comprises a transfer capacitor receiving a first clock phase;
• a driving capacitor receiving a second clock phase, the second clock phase opposite to the first clock phase;
• a first switch coupling an input node to the transfer capacitor, the first switch controlled by the driving capacitor;
• a second switch coupling the input node to the driving capacitor, the second switch controlled by the transfer capacitor;
• a third switch coupling the transfer capacitor to an output node, the third switch controlled by the driving capacitor, the third switch operating in phase opposition to the first switch;
• a first diode coupled to the driving capacitor and the output node, the first diode clamping a voltage of the driving capacitor to the output node, thereby preventing the first, second and third switches from experiencing voltages in excess of their required voltage rating during discharge;
• and a charge storage capacitor coupled to the output node, wherein during steady state operation the first diode conducts no current and is in an off state.

A MEMS system comprising:

• a MEMS device;
• and
• a charge pump coupled to the MEMS device, the charge pump comprising a plurality of stages, wherein each of the stages comprises a transfer capacitor receiving one of a first or second clock phase;
• a driving capacitor receiving the other of a first or second clock phase, the second clock phase opposite to the first clock phase;
• a first switch coupling an input node to the transfer capacitor, the first switch controlled by the driving capacitor;
• a second switch coupling the input node to the driving capacitor, the second switch controlled by the transfer capacitor;
• a third switch coupling the transfer capacitor to an output node, the third switch controlled by the driving capacitor, the third switch operating in phase opposition to the first switch;
• a first diode coupled to the driving capacitor and the output node, the first diode clamping a voltage of the driving capacitor to the output node, thereby preventing the first, second and third switches from experiencing voltages in excess of their required voltage rating during discharge;
• and a charge storage capacitor coupled to the output node;
• wherein during steady state operation the first diode conducts no current and is in an off state.