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US 8,796,817 B2Granted
Semiconductor device
AssigneeMitsubishi Electric Corporation
InventorToshio Okuda
Life of this patent
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Abstract
A semiconductor device includes a multilayer substrate, a semiconductor element secured to an upper surface of the multilayer substrate, a first metal pattern located on a portion of a lower surface of the multilayer substrate, a dielectric having a higher permittivity than the multilayer substrate and located on the lower surface of the multilayer substrate, and a bottom surface electrode located on a bottom surface of the semiconductor device. The bottom surface electrode, the dielectric, and the first metal pattern together form a bypass capacitor.
Claims2
A semiconductor device comprising:
- a multilayer substrate having upper and lower surfaces and a permittivity;
- a semiconductor element secured to said upper surface of said multilayer substrate;
- an intra-substrate via that is connected electrically to said semiconductor element and located in said multilayer substrate, extending to said lower surface of said multilayer substrate;
- a first metal pattern located on a portion of said lower surface of said multilayer substrate;
- a second metal pattern in contact with a lower end of said intra-substrate via;
- a dielectric having a higher permittivity than the permittivity of said multilayer substrate and located on said lower surface of said multilayer substrate, covering said first and second metal patterns;
- a first intra-dielectric via located in said dielectric, connected at an upper end to said first metal pattern, and extending to a lower surface of said dielectric;
- a second intra-dielectric via located in said dielectric, connected at an upper end to said second metal pattern, and extending to said lower surface of said dielectric;
- a ground pattern connected to a lower end of said first intra-dielectric via;
- and
- a bottom surface electrode connected to a lower end of said second intra-dielectric via, wherein
- a portion of said first metal pattern is disposed on said dielectric directly opposite a portion of said bottom surface electrode, and
- said bottom surface electrode, said dielectric, and said first metal pattern, together, constitute a bypass capacitor.
10 more elements
Dependencies are inferred from the claim text.