High-integration semiconductor memory device and method of manufacturing the same
AssigneeSK hynix Inc.
InventorsJang Uk Lee, Sung Cheoul Kim, Kang Sik Choi, Suk Ki Kim
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AssigneeSK hynix Inc.
InventorsJang Uk Lee, Sung Cheoul Kim, Kang Sik Choi, Suk Ki Kim
Estimating the term…
A semiconductor memory device includes a semiconductor substrate, an active region including a plurality of unit active regions and disposed over and spaced from the semiconductor substrate, a pair of word lines formed on a top surface and sides of the unit active region, a dummy word line disposed at a contact of the unit active regions and formed on top surfaces and sides of the unit active regions, a source region in the unit active region between the pair of word lines and electrically connected to the semiconductor substrate, drain regions formed in the unit active region between the pair of word lines and the dummy word line, and first storage layers formed on the drain regions and electrically connected to the drain regions.
A semiconductor memory device, comprising:
A semiconductor memory device, comprising:
Dependencies are inferred from the claim text.