Method for fabricating substrate with nano structures, light emitting device and manufacturing method thereof
AssigneesLG Electronics Inc., LG Innotek Co., Ltd.
InventorsJong Wook Kim, Hyun Kyong Cho
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Abstract
A method of fabricating a substrate with nano structures, light emitting device using the substrate and a manufacturing method thereof, wherein a substrate for growing a light emitting device is formed with nano agglomerations, and the substrate is etched by using the agglomerations as a mask to allow nano structures to be formed on the substrate, thereby enabling to grow a crystal defect-reduced, reliability-improved, good quality light emitting structure, and wherein the light emitting structure is formed with nano structures to enhance the light extraction efficiency.
Claims19
A vertical semiconductor light emitting element comprising:
- a first semiconductor layer with a plurality of nano structures thereunder having a first polarity;
- an active layer on the first semiconductor layer;
- a second semiconductor layer on the active layer having a second polarity opposite the first polarity;
- a first electrode on some of the nano structures of the first semiconductor layer;
- a second electrode on the second semiconductor layer, the second electrode including a reflective ohmic electrode on an entire area of the second semiconductor layer, and a metal layer on a portion of the reflective ohmic electrode;
- and
- a support directly contacting the metal layer configured to support the metal layer, wherein a center portion of the second electrode is vertically aligned with a center portion of the first electrode.
Dependencies are inferred from the claim text.