Charged particle beam drawing method and apparatus

A charged particle beam drawing apparatus, comprising:

• a charged particle beam gun;
• a first forming aperture member having an opening, wherein a charged particle beam emitted from the charged particle beam gun is passed through the opening of the first forming aperture member;
• a beam size changing deflector configured to deflect the charged particle beam passed through the opening of the first forming aperture member;
• a second forming aperture member having an opening, wherein the charged particle beam passed through the opening of the first forming aperture member is passed through the opening of the second forming aperture member;
• a movable stage for supporting a workpiece, wherein patterns corresponding to figures included in a drawing data are drawn on the workpiece by the charged particle beam passed through the opening of the second forming aperture member;
• and
• a drawing data correcting process portion, including a computer, for moving the figures in the drawing data on the basis of positions in the opening of the second forming aperture member so that a position difference of the charged particle beam is cancelled, where the charged particle beam for drawing the patterns corresponding to the figures is passed through,
• wherein a figure of the figures in the drawing data is moved by a position difference between a position in the opening of the second forming aperture member where a charged particle beam which is not deflected by a beam size changing deflector passes and a position in the opening of the second forming aperture member where a charged particle beam to form a pattern corresponding to the figure passes.