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US 8,796,620 B2Granted
Mass spectrometry for gas analysis with a one-stage charged particle deflector lens between a charged particle source and a charged particle analyzer both offset from a central axis of the deflector lens
AssigneeMKS Instruments, Inc.
InventorsPhilip Neil Shaw, Jonathan Hugh Batey
Life of this patent
Estimating the term…
Abstract
Apparatus, methods and systems are provided to inhibit a sightline from a charged particle source to an analyzer and for changing a baseline offset of an output spectrum of an analyzer. A supply of charged particles is directed through a hollow body of a deflector lens that is positioned relative to a charged particle source and an analyzer. A flow path along a preferred flow path through a deflector lens permits passage of the ions from the source to the detector while inhibiting a sightline from the detector to the source in a direction parallel to the central longitudinal axis of the deflector lens.
Claims18
A charged particle lens assembly comprising:
- a hollow body defining a first end, a second end and a first axis extending from the first end to the second end along a centerline of the hollow body, wherein the hollow body is substantially linear along the first axis and the hollow body has an aspect ratio of between 1.3 and 1.6 defined by a longitudinal length along the first axis divided by a diameter of the first end, the second end, or both;
- a first electrode assembly positioned relative to the first end of the hollow body and defining a first aperture spaced from the first axis for receiving an incident beam of charged particles;
- and
- a second electrode assembly positioned relative to the second end of the hollow body and defining a second aperture spaced from the first axis for passing charged particles out of the lens assembly,
- the hollow body configured to, when an electric potential is applied, direct a supply of charged particles incident from the first aperture towards the second aperture for exiting the assembly while crossing at least a portion of the first axis.
2 more elements
A system comprising:
- an interface to a supply of charged particles having a variable pressure or gas composition;
- a particle flow-direction structure in communication with the supply of charged particles, the charged particle flow-direction structure including (a) a hollow body defining a first end and a second end and a first axis extending from the first end to the second end along a centerline of the hollow body, wherein the hollow body is substantially linear along the first axis and the hollow body has an aspect ratio of between 1.3 and 1.6 defined by a longitudinal length along the first axis divided by a diameter of the first end, the second end, or both (b) a first electrode assembly positioned relative to the first end of the hollow body and a first aperture spaced from the first axis for receiving an incident supply of charged particles and (c) a second electrode assembly positioned relative to the second end of the hollow body and a second aperture spaced from the first axis, the hollow body configured to, when an electric potential is applied, direct a supply of charged particles incident from the first electrode assembly towards the second electrode assembly while crossing at least a portion of the first axis;
- and
- a charged particle analyzer module in communication with the particle flow-direction structure and positioned relative to the second electrode assembly to receive a flow of charged particles exiting the particle flow-direction structure.
1 more element
A system comprising:
- means for interfacing to a supply of charged particles having a variable pressure or gas composition;
- particle flow-direction means for directing a flow of particles received from the means for interfacing at a first electrode assembly via a first aperture along a flow path through a hollow body toward a second electrode assembly adjacent a second aperture, the first aperture and second aperture spaced from an axis extending from a first end to a second end of the hollow body along a centerline of the hollow body, the hollow body being substantially linear along the first axis and has an aspect ratio of between 1.3 and 1.6 defined by a longitudinal length along the first axis divided by a diameter of the first end, the second end, or both, the flow path defined at least in part by an electric potential applied to the hollow body and is adapted to cross at least a portion of the first axis;
- and
- charged particle analyzer means in communication with the particle flow-direction means for collecting and analyzing a flow of charged particles from the particle flow-direction means.
1 more element
Dependencies are inferred from the claim text.