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US 8,796,613 B2Granted
Encoder apparatus using liquid to suppress detection failure
AssigneeNikon Corporation
InventorSusumu Makinouchi
Life of this patent
Estimating the term…
Abstract
An encoder apparatus comprises a first scale member with a scale region on which a scale is arranged; a detector that detects light from the scale region; and a retaining member with a retaining surface that is arranged so as to face a surface of the first scale member including the scale region via a predetermined gap, and that retains a liquid at least between the retaining surface and the first scale member.
Claims7
An optical encoder comprising:
- a scale member with a scale region including a scale, the scale region being more lyophilic than a region arranged next to the scale region;
- a detector that detects light from the scale region;
- and
- a retaining member with a retaining surface that faces the scale region and the region via a gap and retains a liquid between the retaining surface and the scale region, wherein
- the scale member moves relative to the detector in a state with the scale region being in contact with the liquid.
2 more elements
Dependencies are inferred from the claim text.