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US 8,796,081 B2Granted
Semiconductor structure and method for forming the same
AssigneeTsinghua University
InventorsJing Wang, Jun Xu, Lei Guo
Life of this patent
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Abstract
A semiconductor structure is provided, comprising: a Si substrate; a porous structure layer formed on the Si substrate, in which the porous structure layer has a flat surface and comprises a Si1-xGex layer with low Ge content; and a Ge-containing layer formed on the porous structure layer, in which the Ge containing layer comprises a Ge layer or a Si1-yGey layer with high Ge content and x≦y. Further, a method for forming the semiconductor structure is also provided.
Claims3
A semiconductor structure, comprising:
- a Si substrate;
- a plurality of isolation structures formed on the Si substrate and spaced apart from each other by a predetermined pattern, wherein a growth region is formed between every two adjacent isolation structures;
- a porous structure layer formed in the growth region, wherein the porous structure layer has a flat surface and comprises a Si1-xGex layer with low Ge content;
- a Ge-containing layer formed on the porous structure layer, wherein the Ge-containing layer comprises a Ge layer or a Si1-yGey layer with high Ge content and x≦y;
- and
- at least one of (i) a Si layer or a SiGe layer with low Ge content formed between the porous structure layer and the Ge-containing layer and (ii) a strontium germanide layer, a barium germanide layer, a stannum germanide layer, a SiGe passivation layer with low Ge content or a Si passivation layer formed on the Ge-containing layer.
3 more elements
Dependencies are inferred from the claim text.