Apparatus for fabricating and optically detecting biochip

An apparatus for fabricating a biochip, the apparatus comprising:

• a reaction chamber which encapsulates the biochip to be sealed from an external environment;
• an exposure system which has a light source and a spatial light modulator, the spatial light modulator receives light from the light source and forms an optical image utilizing the received light, the optical image being received by the biochip;
• a detection system which detects light proceeding from the biochip;
• an optical path changing unit comprising
• a polarizing beam splitter which is disposed between the light source and the spatial light modulator;
• a polarizer which is disposed between the light source and the polarizing beam splitter;
• and
• a quarter-wavelength plate which is disposed between the polarizing beam splitter and the spatial light modulator;
• and
• a distortion correction device disposed between the polarizing beam splitter and the reaction chamber, wherein the distortion correction device comprises a deformable mirror having a reflective surface which is deformable in response to at least one of mechanical and electrical manipulation for correcting distortion of the optical image.