Resist composition, method of forming resist pattern and polymeric compound
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakahiro Dazai, Yoshiyuki Utsume, Jun Iwashita, Kensuke Matsuzawa, Kenri Konno
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsTakahiro Dazai, Yoshiyuki Utsume, Jun Iwashita, Kensuke Matsuzawa, Kenri Konno
Estimating the term…
A resist composition including a base component (A) which generates acid upon exposure and exhibits changed solubility in a developing solution under the action of acid, the base component (A) containing a polymeric compound (A1) including a structural unit (a0) represented by general formula (a0-1) shown below, a structural unit (a1) containing an acid decomposable group which exhibits increased polarity by the action of acid and a structural unit (a6) which generates acid upon exposure (wherein R1 represents a hydrogen atom, an alkyl group or a halogenated alkyl group; W represents —COO—, —CONH— or a divalent aromatic hydrocarbon group; Y1 and Y2 represents a divalent linking group or a single bond; R′1 represents a hydrogen atom or an alkyl group of 1 to 6 carbon atoms; R′2 represents a monovalent aliphatic hydrocarbon group; and R2 represents an —SO2— containing cyclic group).
A resist composition comprising a base component (A) which generates acid upon exposure and exhibits changed solubility in a developing solution under the action of acid,
A polymeric compound comprising a structural unit (a0) represented by general formula (a0-1) shown below, a structural unit (a1) containing an acid decomposable group which exhibits increased polarity by the action of acid and a structural unit (a6) which generates acid upon exposure and includes a group represented by general formula (a6-0-1) or (a6-0-2) shown below:
Dependencies are inferred from the claim text.