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US 8,795,839 B2Granted
Repair method for optical elements having a coating and corresponding optical elements
AssigneeCarl Zeiss SMT GmbH
InventorThure Boehm
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Abstract
A method for repairing optical elements having a coating, in which the coating is fully or partially removed or left on the optical element, a polishing layer being provided in the coating or a polishing layer being applied, which allows simple processing of the surface to achieve high geometrical accuracy and lower surface roughness. A new coating is applied onto the corresponding polishing layer. Also addressed are corresponding optical elements, including optical elements recycled according to the method.
Claims7
Optical element having a substrate and a coating, the coating comprising a functional coating and a cleaving layer, wherein
- the cleaving layer is a polishing layer processed more geometrically accurately and with lower surface roughness than the substrate.
Dependencies are inferred from the claim text.