Substrate processing apparatus
AssigneeHitachi Kokusai Electric Inc.
InventorsTokunobu Akao, Kazuyoshi Yamamoto
Life of this patent
Estimating the term…
Abstract
There is provided a substrate processing apparatus that can easily grasp the relationship of a defect substrate between plural batches. A substrate processing apparatus 10 includes: a display unit 16; a storage unit that accumulates and stores production information of the substrate for each batch, the production information being produced when the substrate is processed; a selection receiving unit that receives the selection of plural batches stored in the storage unit; and a display control unit that controls such that substrate information is displayed on the display part, the substrate information being information relating to a state in which the substrates are held the substrate holding part in the plural batches received by the selection receiving unit.
Claims16
A substrate processing apparatus that loads a substrate holding part having many substrates which are held horizontally in a state where the substrates are aligned in the vertical direction with their centers set on the same vertical axis into a processing furnace and which performs a predetermined processing to the substrates, the substrate processing apparatus comprising:
- a storage unit having a configuration that accumulates and stores production information relating to the substrate for each processing, the production information being produced when the substrate is processed;
- a display part having a configuration that displays production histories stored in the storage unit;
- an operation unit having a configuration that includes a reception part for receiving plural selections of the displayed production history and a substrate information switching part having a configuration that switches to a substrate information screen for showing information relating to a state of the substrates held in the substrate holding part;
- and
- a display control unit configured to control a display of information including the state in which the substrates are held in the substrate holding part with respect to the production histories displayed on the display part, wherein
- when the substrate information switching part is activated, the display control unit is configured to that display a variation in the state of transfer between the plural batches of the substrates on the substrate information screen for each of the selected production histories, the variation in the state of transfer is based on:
- (1) a presence or absence of substrates between the plural batches, or (2) a type of each substrate between the plural batches, the variation being detected through comparing the plural batches of the selected production histories,
- wherein the information relating to a state of the substrates held in the substrate holding part is the existence of the substrate.
A substrate processing apparatus that loads a substrate holding part having many substrates which are held horizontally in a state where the substrates are aligned in the vertical direction with their centers set at the same position into a processing furnace and which performs a predetermined processing to the substrates, the substrate processing apparatus comprising:
- a display part having a configuration that displays production information relating to the substrate for each processing, the production information being produced when the substrate is processed;
- a reception part having a configuration that receives the selections of the production information;
- and
- a display control unit configured to control a display by switching to a substrate information screen for showing information relating to a variation in a state of the substrates held in the substrate holding part from the display of the product information with respect to the selected plural product information, the variation in the state of the substrates is based on:
- (1) a presence or absence of substrates between plural batches, or (2) a type of each substrate between plural batches,
- wherein the information relating to a state of the substrates held in the substrate holding part is the existence of the substrate.
A substrate processing apparatus that loads a substrate holding part having many substrates loaded on the substrate holding part into a processing furnace and which performs a predetermined processing to the substrates, the substrate processing apparatus comprising:
- a display control unit configured to switch a file list display of production information relating to the substrates for each processing, the production information being produced when the substrate is processed, and a display of information that is stored in the file of the product information relating to a variation in a state of the substrates held in the substrate holding part, the variation in the state of the substrates is based on:
- (1) a presence or absence of substrates between plural batches, or (2) a type of each substrate between plural batches,
- wherein the information relating to a state of the substrates held in the substrate holding part is the existence of the substrate.
Dependencies are inferred from the claim text.