# US 8,789,211 B2 · Mode-synthesizing atomic force microscopy and mode-synthesizing sensing

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- Number: US 8,789,211 B2
- Document ID: US8789211B2
- Status: Granted
- Kind: B2
- Application number: 13/897,857
- Filed: 2013-05-20
- Published: 2014-01-16
- Granted: 2014-07-22
- Earliest claimed: 2010-03-17
- Assignees: UT-Battelle, LLC; University of Tennessee Research Foundation
- Applicants: UT-Battelle, LLC; University of Tennessee Research Foundation
- Inventors: Ali Passian; Thomas George Thundat; Laurene Tetard
- Web page: https://patentgrep.com/patent/US8789211B2

## CPC

- G01Q 60/36: DC mode
- G01Q 60/24: AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q 60/32: AC mode
- G01Q 60/363: {Contact-mode AFM}
- G01Q 90/00: Scanning-probe techniques or apparatus not otherwise provided for
- G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]

## Abstract

A method of analyzing a sample that includes applying a first set of energies at a first set of frequencies to a sample and applying, simultaneously with the applying the first set of energies, a second set of energies at a second set of frequencies, wherein the first set of energies and the second set of energies form a multi-mode coupling. The method further includes detecting an effect of the multi-mode coupling.

## Claims

### Claim 1

A sensor system comprising:
a first cantilever comprising a first end;
a first excitation source that applies to said first cantilever a first set of energies at a first set of frequencies;
a second cantilever comprising a second end, wherein said second end is adjacent to said first end;
a second excitation source, independent of said first excitation source, that applies a second set of energies at a second set of frequencies, wherein said first set of energies and said second set of energies are simultaneously applied to said first cantilever and said second cantilever, respectively, and form a multi-mode coupling; and
a detector that detects an effect of said multi-mode coupling.

### Claim 2 (depends on 1)

The sensor system of claim 1, wherein said first set of energies is a first set of vibrational energies and said second set of energies is a second set of vibrational energies.

### Claim 3 (depends on 2)

The sensor system of claim 2, further comprising;
a spectrum analyzer that receives a first signal from said detector; and
a display that receives a second signal from said spectrum analyzer and generates a spectrum of said sample based on said second signal.

### Claim 4 (depends on 3)

The sensor system of claim 3, further comprising:
a second detector;
a second spectrum analyzer that receives a third signal from said second detector; and
a second display that receives a fourth signal from said second spectrum analyzer and generates a second spectrum of said sample based on said fourth signal.

### Claim 5 (depends on 2)

The sensor system of claim 2, further comprising;
a lock-in amplifier that receives a first signal from said detector;
a processor that receives a second signal from said lock-in amplifier; and
a display that receives a third signal from said processor and generates an image of said sample based on said third signal.

### Claim 6 (depends on 5)

The sensor system of claim 5, further comprising;
a second detector;
a second lock-in amplifier that receives a fourth signal from said detector;
a second processor that receives a fifth signal from said second lock-in amplifier; and
a second display that receives a sixth signal from said second processor and generates a second image of said sample based on said sixth signal.

### Claim 7

A method of analyzing a sample comprising:
applying a first set of energies at a first set of frequencies to a sample via a first cantilever;
applying a second set of energies at a second set of frequencies to said sample via a second cantilever, wherein said first cantilever is adjacent to said second cantilever, wherein said first set of energies and said second set of energies are simultaneously applied to said first cantilever and said second cantilever, respectively, and form a multi-mode coupling; and
detecting an effect of said multi-mode coupling.

### Claim 8 (depends on 7)

The method of claim 7, further comprising:
displaying a spectrum of said sample based on said detecting.

### Claim 9 (depends on 7)

The method of claim 7, wherein said first set of energies is a first set of vibrational energies and said second set of energies is a second set of vibrational energies.