# US 8,787,525 B2 · X-ray monochromator, method of manufacturing the same and X-ray spectrometer

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- Number: US 8,787,525 B2
- Document ID: US8787525B2
- Status: Granted
- Kind: B2
- Application number: 12/916,025
- Filed: 2010-10-29
- Published: 2011-06-02
- Granted: 2014-07-22
- Earliest claimed: 2009-11-30
- Assignees: Canon Kabushiki Kaisha
- Applicants: Atsushi Komoto; Hirokatsu Miyata; Wataru Kubo
- Inventors: Atsushi Komoto; Hirokatsu Miyata; Wataru Kubo
- Web page: https://patentgrep.com/patent/US8787525B2

## CPC

- G21K 1/06: using diffraction, refraction or reflection, e.g. monochromators (G21K1/10, G21K7/00 take precedence)
- G21K: HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES

## Abstract

An X-ray monochromator including: a substrate having a concave surface; and an inorganic oxide film formed on the concave surface and having a plurality of pores, in which the plurality of pores of the inorganic oxide film being laid periodically in a stacked manner in the normal directions of the concave surface, and in which the plurality of pores being cylindrical is provided. The X-ray monochromator shows an excellent X-ray spectroscopic performance.

## Claims

### Claim 1

An X-ray monochromator comprising:
a substrate having a curved surface with a radius of curvature twice that of a Rowland circle; and
an inorganic oxide film formed on the curved surface and having a plurality of pores,
wherein the plurality of pores are laid periodically in a stacked manner in the inorganic oxide film, and have a structural period in a direction normal to the curved surface,
wherein the plurality of pores are spherical, and
wherein a first symmetric reflection plane includes axes of rotation (n=6) for a plurality of pores in a first region of the inorganic oxide film and is disposed perpendicular to the surface of the inorganic oxide film, and
wherein a second symmetric reflection plane includes axes of rotation (n=6) for a plurality of pores in a second region of the inorganic oxide film, is disposed perpendicular to the surface of the inorganic oxide film, and is not parallel to the first symmetric reflection plane.

### Claim 2 (depends on 1)

The X-ray monochromator according to claim 1, wherein the plurality of spherical pores are arranged as hexagonally close-packed structures.

### Claim 3 (depends on 1)

An X-ray spectrometer comprising:
an X-ray source;
an X-ray monochromator according to claim 1; and
an X-ray detector.

### Claim 4

An X-ray monochromator, comprising:
a substrate having a curved surface; and
an inorganic oxide film formed on the curved surface and having a plurality of cylindrical pores, each of the cylindrical pores extending parallel to the surface of the inorganic oxide film,
wherein the plurality of pores are laid periodically in a stacked manner in the inorganic oxide film, and form a structure that is periodic along a direction normal to the curved surface, and
wherein the radius of curvature of the curved surface is twice that of a Rowland circle.

### Claim 5 (depends on 4)

An X-ray spectrometer comprising:
an X-ray source;
an X-ray monochromator according to claim 4; and
an X-ray detector.