# US 8,787,413 B2 · Temperature controller for gas laser

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- Number: US 8,787,413 B2
- Document ID: US8787413B2
- Status: Granted
- Kind: B2
- Application number: 13/936,819
- Filed: 2013-07-08
- Published: 2013-11-07
- Granted: 2014-07-22
- Earliest claimed: 2009-02-23
- Assignees: Gigaphoton Inc.
- Applicants: Gigaphoton Inc.
- Inventors: Yukio Watanabe; Hideyuki Hayashi; Kouji Kakizaki; Michio Shinozaki; Hideo Hoshino
- Web page: https://patentgrep.com/patent/US8787413B2

## CPC

- H01S 3/0407: {Liquid cooling, e.g. by water}
- F25D 17/02: for circulating liquids, e.g. brine
- H01S 3/03: of gas laser discharge tubes
- H01S 3/22: Gases
- F25B 2400/06: Several compression cycles arranged in parallel
- H01S 3/041: for gas lasers {(H01S3/0401 takes precedence)}
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- F25D: REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR (refrigerated showcases A47F3/04; thermally-insulated vessels for domestic use A47J41/00; refrigerated vehicles, see the appropriate subclasses of classes B60 - B64; containers with thermal insulation in general B65D81/38; heat-transfer, heat-exchange or heat-storage materials, e.g. refrigerants, or materials for the production of heat or cold by chemical reactions other than by combustion C09K5/00; thermally-insulated vessels for liquefied or solidified gases F17C; air-conditioning or air-humidification F24F; refrigeration machines, plants, or systems F25B; cooling of instruments or comparable apparatus without refrigeration G12B)
- F25B: REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS

## Abstract

A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, comprises a first temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each first temperature-controlled portion, a second temperature control portion generating a cooling agent or a heating agent for adjusting a temperature of each second temperature-controlled portion, a first piping system connecting the first temperature control portion and each first temperature-controlled portion in parallel, and a second piping system connecting the second temperature control portion and each second temperature-controlled portion in parallel.

## Claims

### Claim 1

A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including first temperature-controlled portions each of which requires a high-precision temperature-control and second temperature-controlled portions each of which requires a low-precision temperature-control as compared with the first temperature-controlled portions and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portions, the temperature controller for a gas laser comprising:
a first piping system configured to connect the first temperature-controlled portions in parallel with each other;
a second piping system configured to connect the second temperature-controlled portions in parallel with each other; and
a temperature control portion located on the first piping system and configured to cool or heat an existing cooling water provided from an upstream cooling system for adjusting a temperature of the first temperature-controlled portions,
the temperature-controlled existing cooling water cooled or heated by the temperature control portion flowing through each first temperature-controlled portion by passing through the first piping system, and
the existing cooling water provided from the upstream cooling system being directly provided to the second piping system.

### Claim 2 (depends on 1)

The temperature controller for a gas laser according to claim 1, further comprising:
a flow controller adjusting a flow rate of the existing cooling water flowing with respect to each first temperature-controlled portion and/or each second temperature-controlled portion.

### Claim 3 (depends on 1)

The temperature controller for a gas laser according to claim 1, wherein
diameters of pipes with respect to the first temperature-controlled portions and/or the second temperature-controlled portions are different depending on temperature-control capacities of the first temperature-controlled portions and/or the second temperature-controlled portions.