# US 8,786,967 B2 · MEMS snubber systems and methods

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- Number: US 8,786,967 B2
- Document ID: US8786967B2
- Status: Granted
- Kind: B2
- Application number: 13/844,140
- Filed: 2013-03-15
- Published: 2013-08-22
- Granted: 2014-07-22
- Earliest claimed: 2007-11-09
- Assignees: DigitalOptics Corporation MEMS
- Applicants: DigitalOptics Corporation MEMS
- Inventors: Guiqin Wang; Roman C. Gutierrez
- Web page: https://patentgrep.com/patent/US8786967B2

## CPC

- G02B 7/02: for lenses {(supports for magnifying lenses G02B25/002)}
- G02B 7/08: adapted to co-operate with a remote control mechanism
- G02B 27/646: {compensating for small deviations, e.g. due to vibration or shake (movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68)}
- G03B 3/10: Power-operated focusing
- H05K 5/0217: {Mechanical details of casings (covers, lids, hoods or members for covering apertures H05K5/03)}
- G03B 2205/0084: using other types of actuators
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G03B: APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR (optical parts of such apparatus G02B; photosensitive materials or processes for photographic purposes G03C; apparatus for processing exposed photographic materials G03D)
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

## Abstract

Techniques are disclosed for systems and methods to provide concomitant mechanical motion inhibition and electrical distribution for actuator modules, such as microelectromechanical systems (MEMS) based optical actuators adapted to move and/or orient one or more lenses and/or optical devices of a camera module. A mechanical motion inhibition and electrical distribution system may include one or more flexible snubber structures disposed substantially adjacent a MEMS structure and between the MEMS structure and another component of a camera module. Each flexible snubber structure may be implemented with one or more electrical traces, flexible films, snubber films, and/or mechanical stabilizers adapted to route electrical signals to or from the MEMS structure and/or to inhibit mechanical motion of at least a portion of the MEMS structure.

## Claims

### Claim 1

A flexible snubber structure, comprising:
a ribbon portion comprising one or more electrical traces, wherein the electrical traces are at least partially electrically insulated by a ribbon film;
a substantially planar snubber portion comprising a plurality of mechanical stabilizers embedded in a snubber film; and
a folding portion coupling the ribbon portion to the snubber portion, wherein at least one of the mechanical stabilizers is electrically conductive, and wherein corresponding ones of the electrical traces are electrically coupled to the electrically conductive mechanical stabilizers.

### Claim 2 (depends on 1)

The flexible snubber structure of claim 1, wherein:
a first number of the electrically conductive mechanical stabilizers is equal to or greater than a second number of the electrical traces; and
each one of the electrical traces is electrically coupled to at least one electrically conductive mechanical stabilizer.

### Claim 3 (depends on 2)

The flexible snubber structure of claim 2, wherein:
the first number is greater than the second number;
each of the mechanical stabilizers is electrically conductive;
the mechanical stabilizers electrically coupled to the electrical traces comprise a first thickness; and
the mechanical stabilizers not electrically coupled to the electrical traces comprise a second thickness different from the first thickness.

### Claim 4 (depends on 1)

The flexible snubber structure of claim 1, wherein:
the electrical traces and the mechanical stabilizers comprise substantially the same thickness.

### Claim 5 (depends on 1)

The flexible snubber structure of claim 1, wherein:
each of the electrically conductive mechanical stabilizers comprise at least one electrical contact; and
one or more patterns of the electrically conductive mechanical stabilizers are adapted to route electrical signals between corresponding electrical traces and electrical contacts.

### Claim 6 (depends on 1)

The flexible snubber structure of claim 1, wherein:
the snubber film comprises a first snubber film substantially disposed on a top side of at least one of the mechanical stabilizers and between the at least one mechanical stabilizer and an adjacent microelectromechanical systems (MEMS) structure;
the snubber portion comprises a second snubber film substantially disposed on a bottom side of the at least one mechanical stabilizer; and
each of the first snubber film, the second snubber film, and the at least one mechanical stabilizer are adapted to inhibit mechanical motion of the MEMS structure.

### Claim 7 (depends on 1)

The flexible snubber structure of claim 1, wherein:
at least one of the mechanical stabilizers of the snubber portion is disposed adjacent to and inhibits mechanical motion of one or more microelectromechanical systems (MEMS) structures;
the flexible snubber structure and the one or more MEMS structures are integrated with one or more lenses actuated by the one or more MEMS structures to form a moveable lens module.

### Claim 8 (depends on 7)

The flexible snubber structure of claim 7, further comprising:
a lens barrel; and
one or more optical devices structurally supported by the lens barrel, wherein the moveable lens module is integrated with the lens barrel and/or the one or more optical devices to form a camera module.

### Claim 9 (depends on 8)

The flexible snubber structure of claim 8, further comprising:
a digital camera, a smartphone, a personal digital assistant, a computer, a tablet or notebook computer, a kiosk, or an electronic device, wherein the camera module is integrated with the digital camera, smartphone, personal digital assistant, computer, tablet or notebook computer, kiosk, or electronic device.

### Claim 10

A system, comprising:
a moveable lens module;
a lens barrel; and
a flexible snubber structure disposed substantially between the moveable lens module and the lens barrel, wherein the flexible snubber structure comprises:
a ribbon portion comprising one or more electrical traces, wherein the electrical traces are at least partially electrically insulated by a ribbon film;
a substantially planar snubber portion comprising a plurality of mechanical stabilizers embedded in a snubber film; and
a folding portion coupling the ribbon portion to the snubber portion, wherein at least one of the mechanical stabilizers is electrically conductive, and wherein corresponding ones of the electrical traces are electrically coupled to the electrically conductive mechanical stabilizers.

### Claim 11 (depends on 10)

The system of claim 10, wherein:
a first number of the electrically conductive mechanical stabilizers is equal to or greater than a second number of the electrical traces; and
each one of the electrical traces is electrically coupled to at least one electrically conductive mechanical stabilizer.

### Claim 12 (depends on 11)

The system of claim 11, wherein:
the first number is greater than the second number;
each of the mechanical stabilizers is electrically conductive;
the mechanical stabilizers electrically coupled to the electrical traces comprise a first thickness; and
the mechanical stabilizers not electrically coupled to the electrical traces comprise a second thickness different from the first thickness.

### Claim 13 (depends on 10)

The system of claim 10, wherein:
the electrical traces and the mechanical stabilizers comprise substantially the same thickness.

### Claim 14 (depends on 10)

The system of claim 10, wherein:
each of the electrically conductive mechanical stabilizers comprise at least one electrical contact;
one or more patterns of the electrically conductive mechanical stabilizers are adapted to route electrical signals between corresponding electrical traces and electrical contacts; and
the corresponding electrical contacts are disposed to route electrical signals to corresponding components of the moveable lens module.

### Claim 15 (depends on 10)

The system of claim 10, wherein:
the snubber film comprises a first snubber film substantially disposed on a top side of at least one of the mechanical stabilizers and between the at least one mechanical stabilizer and the moveable lens module;
the snubber portion comprises a second snubber film disposed on a bottom side of the at least one mechanical stabilizer and between the at least one mechanical stabilizer and the lens barrel; and
each of the first snubber film, the second snubber film, and the at least one mechanical stabilizer are adapted to inhibit mechanical motion of one or more microelectromechanical systems (MEMS) structures of the moveable lens module.

### Claim 16 (depends on 10)

The system of claim 10, wherein:
at least one of the mechanical stabilizers of the snubber portion is disposed adjacent to and inhibits mechanical motion of one or more microelectromechanical systems (MEMS) structures of the moveable lens module.

### Claim 17 (depends on 10)

The system of claim 10, wherein:
the moveable lens module, lens barrel, and the flexible snubber are integrated together to form a camera module.

### Claim 18 (depends on 16)

The system of claim 16, further comprising:
a digital camera, a smartphone, a personal digital assistant, a computer, a tablet or notebook computer, a kiosk, or an electronic device, wherein the camera module is integrated with the digital camera, smartphone, personal digital assistant, computer, tablet or notebook computer, kiosk, or electronic device.

### Claim 19

A method comprising:
providing a ribbon portion of a flexible snubber structure, wherein the ribbon portion comprises one or more electrical traces, and wherein the electrical traces are at least partially electrically insulated by a ribbon film;
providing a substantially planar snubber portion of a flexible snubber structure, wherein the substantially planar snubber portion comprises a plurality of mechanical stabilizers embedded in a snubber film; and
providing a folding portion of a flexible snubber structure, wherein the folding portion couples the ribbon portion to the snubber portion, wherein at least one of the mechanical stabilizers is electrically conductive, and wherein corresponding ones of the electrical traces are electrically coupled to the electrically conductive mechanical stabilizers.

### Claim 20 (depends on 19)

The method of claim 19, further comprising:
assembling a camera module comprising the flexible snubber structure disposed substantially between a moveable lens module and a lens barrel.

### Claim 21 (depends on 20)

The method of claim 20, further comprising:
assembling a digital camera, a smartphone, a personal digital assistant, a computer, a tablet or notebook computer, a kiosk, or a portable electronic device comprising the camera module.
