# US 8,786,945 B2 · Laser scan confocal microscope

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- Number: US 8,786,945 B2
- Document ID: US8786945B2
- Status: Granted
- Kind: B2
- Application number: 13/766,405
- Filed: 2013-02-13
- Published: 2013-06-20
- Granted: 2014-07-22
- Earliest claimed: 2006-12-22
- Assignees: Nikon Corporation
- Applicants: Nikon Corporation
- Inventors: Yuki Yoshida; Naoshi Aikawa
- Web page: https://patentgrep.com/patent/US8786945B2

## CPC

- G02B 21/0032: {Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06)}
- G02B 21/00: Microscopes
- G02B 21/0024: {Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders}
- G02B 21/0048: {scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors}
- G02B 21/0076: {arrangements using fluorescence or luminescence}
- G02B 21/16: adapted for ultraviolet illumination {; Fluorescence microscopes (G02B21/0076 takes precedence)}
- G02B 26/105: {with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence)}
- G02B 27/0025: {for optical correction, e.g. distorsion, aberration}
- G02B 27/0081: {with means for altering, e.g. enlarging, the entrance or exit pupil}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a plane-parallel plate after light of unnecessary wavelength is removed by a filter. The plane-parallel plate is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

## Claims

### Claim 1

A laser scan confocal microscope comprising:
a light separator that is configured to separate illumination light of a light source and observation light, the observation light being emitted from a specimen;
a light scanner that is configured to scan the illumination light on the specimen;
an objective lens that is configured to be disposed between the light scanner and the specimen to form a focal point on the specimen;
a collective lens that is configured to collect the observation light to a position conjugate to the focal point of the objective lens;
a pinhole plate which is provided in a focal plane of the collective lens;
a detector that is configured to detect observation light having passed through a pinhole of the pinhole plate;
a plane-parallel plate which is disposed between an illumination lens and the light source, the illumination lens being provided between the light source and the light separator; and
a controller that controls rotation of the plane-parallel plate in accordance with a driving amount of the plane-parallel plate, the driving amount being calculated based on chromatic aberration of magnification of the objective lens relating to a deflection amount of the light scanner.

### Claim 2 (depends on 1)

The laser scan confocal microscope according to claim 1, further comprising another plane-parallel plate, the two plane-parallel plates having rotating axes perpendicular to each other.

### Claim 3 (depends on 1)

The confocal microscope according to claim 1, wherein the plane-parallel plate is configured to correct an optical path deviation between the illumination light and the observation light, the optical path deviation being generated according to the deflection amount of the light scanner.

### Claim 4 (depends on 1)

The laser scan confocal microscope according to claim 1, wherein the controller comprises a storage device in which a relationship between the deflection amount of the light scanner and a drive amount of the plane-parallel plate is stored for each objective lens used, the relationship being calculated using data relating to chromatic aberration of magnification of the objective lens.

### Claim 5 (depends on 1)

The laser scan confocal microscope according to claim 1, wherein the controller comprises:
a storage device in which data relating to chromatic aberration of magnification is stored for each objective lens used; and
an operation device that is configured to compute, using the data, a relationship between the deflection amount of the light scanner and a drive amount of the plane-parallel plate.

### Claim 6 (depends on 5)

The laser scan confocal microscope according to claim 5, further comprising a correction device that is configured to correct the drive amount using scanning information on the light scanner and intensity information on the observation light.