# US 8,786,859 B2 · High resolution surface plasmon resonance sensor and sensor system thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,786,859 B2 - Document ID: US8786859B2 - Status: Granted - Kind: B2 - Application number: 12/534,497 - Filed: 2009-08-03 - Published: 2010-05-27 - Granted: 2014-07-22 - Earliest claimed: 2008-11-27 - Assignees: Korea Institute of Science and Technology - Applicants: Kyeong Seok Lee; Won Mok Kim; Taek Sung Lee; Byung Ki Cheong - Inventors: Kyeong Seok Lee; Won Mok Kim; Taek Sung Lee; Byung Ki Cheong - Web page: https://patentgrep.com/patent/US8786859B2 ## CPC - G01N 21/553: {and using surface plasmons (fluorescence excitation G01N21/648; enhanced Raman G01N21/658)} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract Provided is a surface plasmon resonance sensor including: a part of delivering light by which a signal beam is incident to generate an evanescent field; and a part of exciting surface plasmon for exciting surface plasmons by the generated evanescent field and giving rise to a surface plasmon resonance, wherein a dielectric waveguide layer is inserted between metal layers of the part of exciting surface plasmon, and surface plasmon resonance properties are changed by an object to be analyzed. ## Claims ### Claim 1 A surface plasmon resonance generator comprising: a prism by which an incident light beam is directed to a surface plasmon generator stack for generating an evanescent field at an interface of the prism and the surface plasmon generator stack, the prism having two sides and a base; and the surface plasmon generator stack including: an inner metal layer having a first surface and a second surface, the first surface in contact with the base of the prism; a dielectric waveguide in contact with the second surface of the inner metal layer; and an outer metal layer having a third surface in contact with the dielectric waveguide and a fourth surface adjacent to a surface of an analyte, wherein the surface plasmon generator stack gives rise to propagating surface plasmons of a surface plasmon resonance at the outer metal layer by the evanescent field; and wherein the surface plasmon resonance properties of the surface plasmon generator stack are changed by the analyte disposed on the fourth surface of the outer metal layer, and the responsivity of the plasmon resonance of the surface plasmon generator stack is controlled by controlling a thickness ratio of a first thickness of the inner metal layer to a second thickness of the outer metal layer; and wherein a refractive index of the dielectric waveguide is greater than that of the prism. ### Claim 2 (depends on 1) The surface plasmon resonance generator according to claim 1, wherein: the inner metal layer is adjacent to the prism and is optically coupled thereto; the dielectric waveguide is optically coupled to the inner metal layer; and the outer metal layer is optically coupled to the dielectric waveguide, wherein the dielectric waveguide protects the inner metal layer, and increases a control range of the thickness ratio between the inner and outer metal layers. ### Claim 3 (depends on 1) The surface plasmon resonance generator according to claim 1, further comprising an optically reflective interface formed at an interface of the prism and the inner metal layer, the optically reflective interface totally reflecting the incident light beam. ### Claim 4 (depends on 1) The surface plasmon resonance generator according to claim 1, further comprising a light sensor configured to measure a change in the plasmon resonance properties of a light beam reflected by the plasmon generator stack, the light sensor detecting a change of at least one of a resonance angle, a wavelength, a reflected intensity, and a phase of the incident light beam. ### Claim 5 (depends on 1) The surface plasmon resonance generator according to claim 1, wherein the prism includes a surface grating optically coupled to the inner metal layer. ### Claim 6 (depends on 1) The surface plasmon resonance generator according to claim 1, wherein the inner metal layer includes silver (Ag) or an alloy comprising Ag, and the outer metal layer includes gold (Au) or an alloy comprising Au. ### Claim 7 (depends on 1) The surface plasmon resonance generator according to claim 1, wherein the dielectric waveguide is made of a material which is optically transparent in a wavelength region of operation from 500 to 1800 nm. ### Claim 8 (depends on 1) The surface plasmon resonance generator according to claim 1, further comprising: an optically transparent substrate interposed between the prism and the inner metal layer; and a refractive index matching oil layer interposed between the substrate and the prism to optically couple the substrate and the prism to each other. ### Claim 9 A surface plasmon resonance sensor system comprising: a light source for providing a signal beam to generate surface plasmons; a surface plasmon resonance sensor of which surface plasmon resonance properties are changed by an analyte to be analyzed; and a light detector for measuring a reflected beam which experiences surface plasmon resonance and emerges from the surface plasmon resonance sensor, wherein the surface plasmon resonance sensor includes: a prism by which the signal beam is propagated to form an evanescent field at an interface of the prism and a surface plasmon generator stack, the prism having a base; the surface plasmon generator stack including: an inner metal layer having a first surface and a second surface, the first surface in contact with the base of the prism; a dielectric waveguide in contact with the second surface of the inner metal layer and an outer metal layer having a third surface in contact with the dielectric waveguide and fourth surface adjacent to a surface of the analyte to be analyzed, wherein the surface plasmon generator stack gives rise to propagating surface plasmons of a surface plasmon resonance at the outer metal layer by the evanescent field, and the surface plasmon resonance properties of the surface plasmon generator stack are changed by the analyte disposed on the fourth surface of the outer metal layer, and the responsivity of the plasmon resonance is controlled by controlling a thickness ratio of a first thickness of the inner metal layer to a second thickness of the outer metal layer; and wherein a refractive index of the dielectric waveguide is greater than that of the prism. ### Claim 10 (depends on 9) The surface plasmon resonance sensor system according to claim 9, wherein the part of exciting surface plasmon includes: an inner metal layer adjacent to the prism and optically coupled thereto; the dielectric waveguide optically coupled to the inner metal layer; and the outer metal layer optically coupled to the dielectric waveguide, wherein the dielectric waveguide protects the inner metal layer, and increases a control range of the thickness ratio between the inner and outer metal layers. ### Claim 11 (depends on 10) The surface plasmon resonance sensor system according to claim 10, further comprising a surrounding medium analyte to be analyzed by the surface plasmon resonance sensor system, wherein the surrounding medium analyte is analyzed depending on the surface plasmon resonance properties of the surface plasmon resonance sensor. ### Claim 12 (depends on 10) The surface plasmon resonance sensor system according to claim 10, wherein the surface plasmon resonance sensor is configured to absorb the incident signal beam due to the surface plasmon resonance; and the surface plasmon resonance properties are changed by the analyte to be analyzed and the thickness ratio of the first thickness of the inner metal layer to the second thickness of the outer metal layer. ### Claim 13 (depends on 12) The surface plasmon resonance sensor system according to claim 12, wherein the analyte to be analyzed is analyzed by controlling the surface plasmon resonance properties or the responsivity of the analyte to be analyzed. ### Claim 14 (depends on 10) The surface plasmon resonance sensor system according to claim 10, wherein the change in the surface plasmon resonance properties and the responsivity to the analyte is detectable by measuring a reflectance of the signal beam, and the reflectance is measurable by detecting the intensity of the reflected beam by the light detector. ### Claim 15 (depends on 10) The surface plasmon resonance sensor system according to claim 10, further comprising: an optically transparent substrate interposed between the prism and the inner metal layer; and a refractive index matching oil layer interposed between the substrate and the prism to optically couple the substrate and the prism to each other. ### Claim 16 (depends on 11) The surface plasmon resonance sensor system according to claim 11, wherein the refractive index of the prism is greater than that of the analyte to be analyzed or the surrounding medium analyte.