# US 8,786,396 B2 · Heater design for heat-trimmed thin film resistors > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,786,396 B2 - Document ID: US8786396B2 - Status: Granted - Kind: B2 - Application number: 13/339,968 - Filed: 2011-12-29 - Published: 2012-05-17 - Granted: 2014-07-22 - Earliest claimed: 2008-09-17 - Assignees: Stmicroelectronics Pte Ltd - Applicants: Calvin Leung; Olivier Le Neel - Inventors: Calvin Leung; Olivier Le Neel - Web page: https://patentgrep.com/patent/US8786396B2 ## CPC - H01C 17/265: {by chemical or thermal treatment, e.g. oxydation, reduction, annealing (etching H01C17/2416)} - H01C 17/267: {by passage of voltage pulses or electric current} - H10D 1/47: Resistors having no potential barriers - H10W 20/498: {Resistive arrangements or effects of, or between, wiring layers} - H10W 40/10: Arrangements for heating - H10D 86/85: characterised by only passive components - H10D 88/00: Three-dimensional [3D] integrated devices - H10W 72/90: Bond pads, in general - H01C: RESISTORS - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A heater design for post-process trimming of thin-film transistors is described. The heater incorporates low sheet-resistance material deposited in non-active connecting regions of the heater to reduce heat generation and power consumption in areas distant from active heating members of the heater. The heating members are proximal to a thin-film resistor. The resistance of the thin-film resistor can be trimmed permanently to a desired value by applying short current pulses to the heater. Optimization of a heater design is described. Trimming currents can be as low as 20 mA. ## Claims ### Claim 1 A heat-trimmable resistor comprising: a thin-film resistive element configured as a resistor that is connected to or connectable to a circuit; a thin-film heating region proximal at least a portion of the thin-film resistive element; and an electrically-conductive material in electrical contact with the thin-film heating region and having lower sheet resistance than the thin-film heating region that connects the thin-film heating region to a conductive interconnect. ### Claim 2 (depends on 1) The heat-trimmable resistor of claim 1 incorporated in an integrated circuit. ### Claim 3 (depends on 1) The heat-trimmable resistor of claim 1, wherein the thickness of the electrically-conductive material is greater than the thickness of the thin-film heating region. ### Claim 4 (depends on 3) The heat-trimmable resistor of claim 3, wherein the thickness of the electrically-conductive material is greater than about 10 nm. ### Claim 5 (depends on 3) The heat-trimmable resistor of claim 3, wherein the thickness of the electrically-conductive material is greater than about 50 nm. ### Claim 6 (depends on 1) The heat-trimmable resistor of claim 1, wherein the electrically-conductive material comprises aluminum. ### Claim 7 (depends on 6) The heat-trimmable resistor of claim 6, wherein the electrically-conductive material further comprises copper. ### Claim 8 (depends on 1) The heat-trimmable resistor of claim 1, wherein an active area heating efficiency of the heat-trimmable resistor is greater than about 350° C./W. ### Claim 9 (depends on 1) The heat-trimmable resistor of claim 1, wherein the thin-film resistive element is patterned to have one or a plurality of elongated legs and the thin-film heating region is separated from the one or a plurality of elongated legs by at least one thermally-conductive material. ### Claim 10 (depends on 9) The heat-trimmable resistor of claim 9, wherein the plurality of legs are substantially parallel. ### Claim 11 (depends on 9) The heat-trimmable resistor of claim 9, wherein the plurality of legs are configured in a serpentine pattern. ### Claim 12 (depends on 9) The heat-trimmable resistor of claim 9, wherein the one or plurality of legs each have a length between about 10 microns and about 300 microns. ### Claim 13 (depends on 9) The heat-trimmable resistor of claim 9, wherein the one or plurality of legs each have a width between about 250 nm and about 10 microns. ### Claim 14 (depends on 9) The heat-trimmable resistor of claim 9, wherein the electrically-conductive material is deposited proximal to at least one end portion of the one or plurality of elongated legs. ### Claim 15 (depends on 14) The heat-trimmable resistor of claim 14, wherein the deposited electrically-conductive material is deposited to connect to at least one end portion of the thin-film heating region. ### Claim 16 (depends on 14) The heat-trimmable resistor of claim 14, wherein the electrically-conductive material further electrically connects with an underlying first electrical conductor. ### Claim 17 (depends on 16) The heat-trimmable resistor of claim 16, wherein the connection with the first electrical conductor is formed through at least one via. ### Claim 18 (depends on 16) The heat-trimmable resistor of claim 16, wherein the thin-film resistive element electrically connects with a second electrical conductor. ### Claim 19 (depends on 18) The heat-trimmable resistor of claim 18, wherein the first electrical conductor and second electrical conductor are deposited at the same time.