# US 8,786,298 B2 · Apparatus and method for near field scan calibration

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- Number: US 8,786,298 B2
- Document ID: US8786298B2
- Status: Granted
- Kind: B2
- Application number: 13/323,842
- Filed: 2011-12-13
- Published: 2012-06-28
- Granted: 2014-07-22
- Earliest claimed: 2010-12-22
- Assignees: Electronics and Telecommunications Research Institute
- Applicants: Soon Il Yeo; Jae Kyung Wee; Pil Soo Lee
- Inventors: Soon Il Yeo; Jae Kyung Wee; Pil Soo Lee
- Web page: https://patentgrep.com/patent/US8786298B2

## CPC

- G01R 35/00: Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R 29/0814: {Field measurements related to measuring influence on or from apparatus, components or humans (EMC, EMI and similar testing in general G01R31/001), e.g. in ESD, EMI, EMC, EMP testing, measuring radiation leakage; detecting presence of micro- or radiowave emitters; dosimetry; testing shielding; measurements related to lightning}
- G01R 29/0892: {Details related to signal analysis or treatment; presenting results, e.g. displays; measuring specific signal features other than field strength, e.g. polarisation, field modes, phase, envelope, maximum value}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

Disclosed are a method and an apparatus of near field scan calibration, and more particularly, a method and an apparatus for near field scan calibration for calibrating a characteristic of an antenna for near field scan measurement of a semiconductor chip. The apparatus for near field scan calibration includes: a plane-type text fixture having a plane shape; an antenna positioned spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and a spectrum analyzer analyzing the data acquired by the antenna.

## Claims

### Claim 1

An apparatus for near field scan calibration, comprising:
a plane-type test fixture having a plane shape;
an antenna spaced apart from the plane-type test fixture by a set spacing distance and acquiring data including a magnetic field; and
a spectrum analyzer analyzing the data acquired by the antenna,
wherein the plane-type test fixture has a circular shape.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the spacing distance between the plane-type test fixture and the antenna is 1 mm.

### Claim 3 (depends on 2)

The apparatus of claim 2, wherein the antenna is set as a first port and the plane-type test fixture is set as a second port.

### Claim 4 (depends on 3)

The apparatus of claim 3, wherein the data acquired by the antenna includes the intensity of a spatial magnetic field generated vertically to the surface of the plane-type test fixture including a transmission coefficient and a reflection coefficient.

### Claim 5 (depends on 4)

The apparatus of claim 4, wherein the magnetic field is acquired by analyzing conducted emission (CE) transferred to a conductor.

### Claim 6 (depends on 1)

The apparatus of claim 1, wherein the plane-type test fixture is made of metal.

### Claim 7

A method for near field scan calibration, comprising:
feeding power to a center of a plane-type test fixture;
acquiring data including a magnetic field from an antenna for near field scan measurement spaced apart from the plane-type test fixture by a set spacing distance; and
extracting a characteristic of the antenna by using the data,
wherein the plane-type test fixture has a circular shape.

### Claim 8 (depends on 7)

The method of claim 7, further comprising feeding the power in an amount corresponding to a size of the plane-type test fixture.

### Claim 9 (depends on 7)

The method of claim 7, wherein the spacing distance between the plane-type test fixture and the antenna is 1 mm.

### Claim 10 (depends on 9)

The method of claim 9, wherein the antenna is set as a first port and the plane-type test fixture is set as a second port.

### Claim 11 (depends on 10)

The method of claim 10, wherein in the acquiring of the data, the intensity of a spatial magnetic field generated vertically to the surface of the plane-type test fixture including a transmission coefficient and a reflection coefficient is acquired.

### Claim 12 (depends on 11)

The method of claim 11, wherein the magnetic field is acquired by analyzing conducted emission (CE) transferred to a conductor.