# US 8,786,001 B2 · Semiconductor devices

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- Number: US 8,786,001 B2
- Document ID: US8786001B2
- Status: Granted
- Kind: B2
- Application number: 12/689,955
- Filed: 2010-01-19
- Published: 2010-05-13
- Granted: 2014-07-22
- Earliest claimed: 2003-09-04
- Assignees: Round Rock Research, LLC
- Applicants: Homer M. Manning
- Inventors: Homer M. Manning
- Web page: https://patentgrep.com/patent/US8786001B2

## CPC

- H10D 1/042: {using deposition processes to form electrode extensions}
- H10B 12/033: {the capacitor extending over the transistor}
- H10B 12/318: {the storage electrode having multiple segments}
- H10D 1/716: {having vertical extensions}
- H10B 12/09: {with simultaneous manufacture of the peripheral circuit region and memory cells}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

A method for forming double-sided capacitors for a semiconductor device includes forming a dielectric structure which supports capacitor bottom plates during wafer processing. The structure is particularly useful for supporting the bottom plates during removal of a base dielectric layer to expose the outside of the bottom plates to form a double-sided capacitor. The support structure further supports the bottom plates during formation of a cell dielectric layer, a capacitor top plate, and final supporting dielectric. An inventive structure is also described.

## Claims

### Claim 1

An in-process semiconductor device comprising: a plurality of container capacitor bottom plates with each plate comprising a bottom and first and second cross-sections, vertically-oriented sides each having a height with each side being unsupported along a majority of its height; a supporting layer having a bottom surface and a top surface, wherein the supporting layer contacts the exterior of each container capacitor bottom plate of the plurality of bottom plates and completely surrounds the cross sections of the bottom plates, and wherein the top and bottom surfaces of the supporting layer are generally free from contact with any other layer; an array area comprising the plurality of container capacitors, bottom plates and a periphery area; and a moat between the periphery area and the array area and having a first side which faces the periphery area and a second side which faces the array area, wherein the second side is exposed and the first side is not exposed.

### Claim 2 (depends on 1)

The in-process semiconductor device of claim 1, wherein the supporting layer has a material selected from the group consisting of silicon dioxide, borophosphosilicate glass, and tetraethyl orthosilicate.

### Claim 3 (depends on 1)

The in-process semiconductor device of claim 1 wherein the plurality of container capacitor bottom plates comprises first, second, and third container capacitor bottom plates and the in-process semiconductor device further comprises:
the first and second capacitor bottom plates, in one of the cross sections, being spaced by a first distance;
the second and third capacitor bottom plates, in one of the cross sections, being spaced by a second distance which is less than the first distance; and
the supporting layer, in one of the cross sections, bridging between the second and third capacitor bottom plates and not bridging between the first and second capacitor bottom plates.

### Claim 4

A semiconductor device comprising:
an upwardly extending container-shaped bottom electrode, wherein the bottom electrode has one continuous interior surface, an exterior surface, a top region and a bottom region;
a lateral support structure horizontally extending from a top region of the exterior surface of the bottom electrode without contacting any portion of the one continuous interior surface of the bottom electrode, the lateral support structure being in physical contact with the exterior surface of the bottom electrode along the entire perimeter of the cross section of the bottom electrode;
a dielectric layer juxtaposed with both a substantial area of the interior surface and a substantial area of the exterior surface; and
a top electrode over at least a portion of the dielectric layer to allow capacitive coupling between the top electrode and a substantial area of both the interior and exterior surfaces of the bottom electrode.

### Claim 5 (depends on 4)

The semiconductor device of claim 4 wherein the lateral support structure comprises silicon nitride.

### Claim 6 (depends on 4)

The semiconductor device of claim 4 wherein the lateral support structure comprises an annular ring around the bottom electrode.

### Claim 7 (depends on 6)

The semiconductor device of claim 6 wherein the bottom electrode is a first bottom electrode and the semiconductor device further comprises the annular ring lateral support structure being physically coupled to a second upwardly extending container-shaped bottom electrode laterally spaced from the first bottom electrode.

### Claim 8

A pair of capacitor memory cells comprising:
first and second upwardly extending vertically-oriented bottom electrodes, wherein the bottom electrodes each have an exterior surface, one continuous inner surface, a top region, and a bottom region, the first and second bottom electrodes are laterally spaced apart;
a lateral support structure horizontally extending from a top region of the exterior surface of the first bottom electrode to a top region of the exterior surface of the second bottom electrode and extending along the entire perimeters of the horizontal cross-sections of the first and second bottom electrodes the lateral support structure not in contact with any interior portion of the bottom electrode;
a dielectric layer covering a majority of the exterior surfaces of the first and second bottom electrodes; and
a common top electrode over at least a portion of the dielectric layer to allow capacitive coupling between the top electrode and a majority of both the exterior surfaces of the first and second bottom electrodes.

### Claim 9 (depends on 8)

The pair of capacitor memory cells of claim 8 wherein:
the first and second bottom electrodes each define a container having an interior surface;
the dielectric layer covers a majority of the interior surfaces of the first and second bottom electrodes; and
the common top electrode over at least a portion of the dielectric layer allows capacitive coupling between the common top electrode and a majority of both the interior surfaces of the first and second bottom electrodes.