# US 8,785,984 B2 · Method for making multi-step photodiode junction structure for backside illuminated sensor

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 8,785,984 B2
- Document ID: US8785984B2
- Status: Granted
- Kind: B2
- Application number: 13/271,780
- Filed: 2011-10-12
- Published: 2012-02-16
- Granted: 2014-07-22
- Earliest claimed: 2006-09-29
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Tzu-Hsuan Hsu; Dun-Nian Yaung
- Inventors: Tzu-Hsuan Hsu; Dun-Nian Yaung
- Web page: https://patentgrep.com/patent/US8785984B2

## CPC

- H10F 39/182: {Colour image sensors}
- H10F 39/199: {Back-illuminated image sensors}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

A method of making a backside illuminated sensor is provided. A substrate is provided and a high energy ion implantation is performed over the substrate to implant a first doped region. A layer is formed over the substrate and a self-align high energy ion implantation is performed over the substrate to implant a second doped region over the first doped region. The combined thickness of the first and second doped region is greater than 50 percent of thickness of the substrate and the distance between back surface of the substrate and the first and second doped regions is less than 50 percent of thickness of the substrate. In this way, an enlarged light sensing region is formed through which electrons generated from back surface of the surface may easily reach the pixel.

## Claims

### Claim 1

A backside illuminated image sensor comprising:
a substrate having a front surface and a back surface, wherein the back surface is a light receiving surface;
a polysilicon layer formed on the substrate;
a first doped region formed within the substrate; and
a second doped region formed within the substrate over the first doped region such that the first doped region is nearer to the light receiving surface of the substrate than the second doped region, wherein the second doped region is formed to have an overlap of only a portion of the polysilicon layer,
wherein the first doped region reaches to a depth of greater than 50 percent of a thickness of the substrate such that a distance between the light receiving surface of the substrate and the first doped region is less than 50 percent of the thickness of the substrate;
wherein the second doped region extends from a top surface of the substrate into at least a portion of the first doped region; and
wherein the first and second doped regions have a first type conductivity.

### Claim 2 (depends on 1)

The backside illuminated image sensor of claim 1, wherein the second doped region is directly over the first doped region.

### Claim 3 (depends on 1)

The backside illuminated image sensor of claim 1, wherein the second doped region is contiguous to the first doped region.

### Claim 4 (depends on 1)

The backside illuminated image-sensor of claim 1, wherein a combined thickness of the first and second doped regions is greater than 50 percent of the thickness of the substrate.

### Claim 5

A backside illuminated image sensor comprising:
a substrate having a front surface and back surface, wherein the back surface is a light receiving surface;
an inter-level dielectric layer formed over the substrate;
at least one metal layer formed in the inter-level dielectric layer;
a polysilicon layer formed on the substrate;
a first doped region formed within the substrate; and
a second doped region formed within the substrate over the first doped region such that the first doped region is nearer to the light receiving surface of the substrate than the second doped region, wherein the second doped region is formed to have an overlap of only a portion of the polysilicon layer;
wherein the second doped region extends from a top surface of the substrate into at least a portion of the first doped region such that a distance between the light receiving surface of the substrate and the first doped region is less than 50 percent of the thickness of the substrate; and
wherein the first and second doped regions have a first type conductivity.

### Claim 6 (depends on 5)

The backside illuminated image-sensor of claim 5, wherein the first doped region reaches to a depth of greater than 50 percent of a thickness of the substrate.

### Claim 7 (depends on 5)

The backside illuminated image-sensor of claim 5, wherein the second doped region is directly over the first doped region.

### Claim 8 (depends on 5)

The backside illuminated image-sensor of claim 5, wherein the second doped region is contiguous to the first doped region.

### Claim 9 (depends on 5)

The backside illuminated image-sensor of claim 5, wherein combined thickness of the first and second doped regions is greater than 50 percent of a thickness of the substrate.

### Claim 10 (depends on 5)

The backside illuminated image sensor of claim 5, wherein the first type conductivity comprises N-type conductivity.

### Claim 11 (depends on 5)

The backside illuminated image sensor of claim 5, wherein the substrate comprises a material selected from the group consisting of silicon, germanium, silicon carbide, gallium arsenic, indium arsenide, indium phosphide, and combinations thereof.

### Claim 12

A backside illuminated image sensor comprising:
a substrate having a front surface and a back surface, wherein the back surface is light receiving surface;
an inter-layer dielectric layer formed over the substrate;
at least one metal layer formed in the inter-level dielectric layer;
a polysilicon layer formed on the substrate;
a first doped region formed within the substrate and extending to a first depth such that a distance between the light receiving surface of the substrate and the first doped region is less than 50 percent of the thickness of the substrate;
a second doped region formed within the substrate over and contiguous to the first doped region such that the first doped region is nearer to the light receiving surface of the substrate than the second doped region, wherein the second doped region is formed to have an overlap of only a portion of the polysilicon layer;
a third doped region formed within the substrate and extending to a second depth; and
a fourth doped region formed within the substrate and extending to a third depth;
wherein the second, third, and fourth doped regions extend from a top surface of the substrate; and
wherein the first depth is greater than the second depth and the second depth is greater than the third depth.

### Claim 13 (depends on 12)

The backside illuminated image sensor of claim 12, wherein the first doped region reaches to a depth of greater than 50 percent of a thickness of the substrate.

### Claim 14 (depends on 12)

The backside illuminated image-sensor of claim 12, wherein the second doped region is directly over the first doped region.

### Claim 15 (depends on 12)

The backside illuminated image sensor of claim 12, wherein the first and second doped regions have a first type conductivity.

### Claim 16 (depends on 12)

The backside illuminated image sensor of claim 12, wherein the inter level dielectric layer comprises a material having a low dielectric constant.

### Claim 17 (depends on 12)

The backside illuminated image sensor of claim 12, wherein a portion of the substrate is disposed between at least one of (a) the first doped region and the third doped region; (b) the second doped region and the third doped region; and (c) the third doped region and the fourth doped region; (d) the first doped region and the fourth doped region; and (e) the second doped region and the fourth doped region.

### Claim 18 (depends on 12)

The backside illuminated image sensor of claim 12, wherein at least one of the first doped region, the second doped region, the third doped region, and the fourth doped region are aligned with a color filter.