# US 8,785,895 B2 · Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,785,895 B2 - Document ID: US8785895B2 - Status: Granted - Kind: B2 - Application number: 13/929,668 - Filed: 2013-06-27 - Published: 2014-01-09 - Granted: 2014-07-22 - Earliest claimed: 2012-06-28 - Assignees: Gigaphoton Inc. - Applicants: Gigaphoton Inc. - Inventors: Hiroshi Umeda; Taku Yamazaki; Hakaru Mizoguchi; Toshihiro Nishisaka - Web page: https://patentgrep.com/patent/US8785895B2 ## CPC - H05G 2/0023: {Constructional details of the ejection system} - G03F 7/70033: {by plasma extreme ultraviolet [EUV] sources} - G03F 7/20: Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) - H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber may include a target generator having a nozzle, a first pipe configured to cover the nozzle, a cover opening provided in the first pipe to allow the target material to pass through the first pipe, and a first valve configured to open and close the cover opening. ## Claims ### Claim 1 A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber, the apparatus comprising: a target generator including a nozzle; a cover configured to cover the nozzle; a cover opening provided in the cover to allow the target material to pass through the cover; and a cover opening/closing section configured to open and close the cover opening. ### Claim 2 (depends on 1) The target supply apparatus according to claim 1, wherein the target generator includes a tank capable of holding the target material in the tank and the nozzle provided so as to communicate with the interior of the tank and protrude from a surface of the tank; and the cover is formed as a cylinder extending from the tank to a leading end of the nozzle, and an internal space surrounded by the cover, the cover opening/closing section, and the tank is made airtight by the cover opening/closing section closing the cover opening. ### Claim 3 (depends on 2) The target supply apparatus according to claim 2, wherein the cover is configured to be capable of extending and retracting in an axial direction of the nozzle; and the cover opening is formed at a size that enables the nozzle to be passed into the cover opening. ### Claim 4 (depends on 1) The target supply apparatus according to claim 1, wherein the target generator includes a tank capable of holding the target material, a cap portion that shuts an end of the nozzle on the opposite side to a nozzle hole, and a pipe that is connected to the tank and the cap portion so that the interior of the tank and the interior of the nozzle communicate; and the cover is formed as a cylinder extending from the cap portion to a leading end of the nozzle, and an internal space surrounded by the cover, the cover opening/closing section, and the cap portion is made airtight by the cover opening/closing section closing the cover opening. ### Claim 5 (depends on 4) The target supply apparatus according to claim 4, wherein the cover is configured to be capable of extending and retracting in an axial direction of the nozzle; and the cover opening is formed at a size that enables the nozzle to be passed into the cover opening. ### Claim 6 (depends on 1) The target supply apparatus according to claim 1, further comprising: a first connecting pipe provided so as to communicate with the interior of the cover via the cover opening; a second connecting pipe provided in the first connecting pipe in a removable state, so as to communicate with the interior of the first connecting pipe; a chamber opening, provided on an end of the second connecting pipe on the opposite side to the first connecting pipe, configured to introduce the target material; a chamber opening/closing section configured to open and close the chamber opening; and an exhaust section configured to exhaust the interior of the first connecting pipe, the interior of the second connecting pipe, and the interior of the cover. ### Claim 7 (depends on 6) The target supply apparatus according to claim 6, further comprising: a purge gas supply section configured to supply a purge gas to the interior of the first connecting pipe, the interior of the second connecting pipe, and the interior of the cover. ### Claim 8 (depends on 6) The target supply apparatus according to claim 6, further comprising: an anchoring portion configured to position and anchor the first connecting pipe and the second connecting pipe. ### Claim 9 A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber, the apparatus comprising: a target generator including a nozzle; and a nozzle hole opening/closing portion configured to open and close a nozzle hole in the nozzle. ### Claim 10 A chamber comprising: a chamber main body including a chamber opening; a target supply apparatus configured to introduce a target material into the chamber main body through the chamber opening; and a chamber opening/closing section configured to open and close the chamber opening. ### Claim 11 An extreme ultraviolet light generation apparatus that generates extreme ultraviolet light by introducing a target material and a laser beam, the apparatus comprising: a target generator including a nozzle; a chamber main body including a chamber opening through which the target material is introduced; a chamber opening/closing section configured to open and close the chamber opening; a cover configured to cover the nozzle; a cover opening provided in the cover to allow the target material to pass through the cover; and a cover opening/closing section configured to open and close the cover opening.