# US 8,785,843 B2 · Mass spectrometer sampling cone with coating

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- Number: US 8,785,843 B2
- Document ID: US8785843B2
- Status: Granted
- Kind: B2
- Application number: 13/922,681
- Filed: 2013-06-20
- Published: 2013-10-24
- Granted: 2014-07-22
- Earliest claimed: 2009-05-13
- Assignees: Micromass UK Limited
- Applicants: Micromass UK Limited
- Inventors: Gordon A. Jones; David S. Douce; Amir Farooq
- Web page: https://patentgrep.com/patent/US8785843B2

## CPC

- H01J 49/04: Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- C23C 14/0635: {Carbides}
- C23C 14/221: {Ion beam deposition (C23C14/46, C23C14/48 take precedence)}
- C23C 14/35: by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)}
- C23C 14/48: Ion implantation
- C23C 16/32: Carbides
- C23C 30/00: Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process (C23C26/00, C23C28/00 take precedence)
- H01J 49/067: {Ion lenses, apertures, skimmers}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)

## Abstract

A sampling cone of a mass spectrometer is disclosed having a metallic boride coating such as titanium diboride.

## Claims

### Claim 1

A mass spectrometer comprising a sampling cone or a cone-gas cone, wherein said sampling cone or cone-gas cone comprises a first coating or surface on at least a portion of said sampling cone or cone-gas cone, wherein said first coating or surface comprises a metallic boride coating or surface.

### Claim 2 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone is made from a material selected from the group consisting of: (i) stainless steel; (ii) a steel alloy comprising ≧11.5% chromium wt. %; (iii) an austenitic stainless steel; (iv) a ferritic stainless steel; (v) an austenitic-ferritic or duplex steel; (vi) titanium; (vii) a titanium alloy; (viii) a nickel-base alloy; (ix) a nickel-chromium alloy; and (x) a nickel-chromium alloy comprising ≧50.0% nickel wt. %.

### Claim 3 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 0-0.01 wt. % carbon; (ii) 0.01-0.02 wt. % carbon; (iii) 0.02-0.03 wt. % carbon; (iv) 0.03-0.04 wt. % carbon; (v) 0.04-0.05 wt. % carbon; (vi) 0.05-0.06 wt. % carbon; (vii) 0.06-0.07 wt. % carbon; (viii) 0.07-0.08 wt. % carbon; or (ix) >0.08 wt % carbon.

### Claim 4 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 0-0.01 wt. % nitrogen; (ii) 0.01-0.02 wt. % nitrogen; (iii) 0.02-0.03 wt. % nitrogen; (iv) 0.03-0.04 wt. % nitrogen; (v) 0.04-0.05 wt. % nitrogen; (vi) 0.05-0.06 wt. % nitrogen; (vii) 0.06-0.07 wt. % nitrogen; or (viii) >0.07 wt. % nitrogen.

### Claim 5 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 0-0.1 wt. % nitrogen; (ii) 0.1-0.2 wt. % nitrogen; (iii) 0.2-0.3 wt. % nitrogen; (iv) 0.3-0.4 wt. % nitrogen; (v) 0.4-0.5 wt. % nitrogen; (vi) 0.5-0.6 wt. % nitrogen; (vii) 0.6-0.7 wt. % nitrogen; or (viii) >0.7 wt. % nitrogen.

### Claim 6 (depends on 1)

Amass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 12.0-13.0 wt. % chromium; (ii) 13.0-14.0 wt. % chromium; (iii) 14.0-15.0 wt. % chromium; (iv) 15.0-16.0 wt. % chromium; (v) 16.0-17.0 wt. % chromium; (vi) 17.0-18.0 wt. % chromium; (vii) 18.0-19.0 wt. % chromium; (viii) 19.0-20.0 wt. % chromium; (ix) 20.0-21.0 wt % chromium; (x) 21.0-22.0 wt. % chromium; (xi) 22.0-23.0 wt. % chromium; (xii) 23.0-24.0 wt. % chromium; (xiii) 24.0-25.0 wt. % chromium; (xiv) 25.0-26.0 wt. % chromium; (xv) 26.0-27.0 wt. % chromium; (xvi) 27.0-28.0 wt. % chromium; (xvii) 28.0-29.0 wt. % chromium; (xviii) 29.0-30.0 wt. % chromium; or (xix) >30.0 wt. % chromium.

### Claim 7 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 0-1.0 wt. % nickel; (ii) 1.0-2.0 wt. % nickel; (iii) 2.0-3.0 wt. % nickel; (iv) 3.0-4.0 wt. % nickel; (v) 4.0-5.0 wt. % nickel; (vi) 5.0-6.0 wt. % nickel; (vii) 6.0-7.0 wt. % nickel; (viii) 7.0-8.0 wt. % nickel; (ix) 8.0-9.0 wt. % nickel; (x) 9.0-10.0 wt. % nickel; (xi) 10.0-11.0 wt. % nickel; (xii) 11.0-12.0 wt. % nickel; (xiii) 12.0-13.0 wt. % nickel; (xiv) 13.0-14.0 wt. % nickel; (xv) 14.0-15.0 wt. % nickel; (xvi) 15.0-16.0 wt. % nickel; (xvii) 16.0-17.0 wt. % nickel; (xviii) 17.0-18.0 wt. % nickel; (xix) 18.0-19.0 wt. % nickel; (xx) 19.0-20.0 wt. % nickel; (xxi) 20.0-21.0 wt. % nickel; (xxii) 21.0-22.0 wt. % nickel; (xxiii) 22.0-23.0 wt. % nickel; (xxiv) 23.0-24.0 wt. % nickel; (xxv) 24.0-25.0 wt. % nickel; (xxvi) 25.0-26.0 wt. % nickel; (xxvii) 26.0-27.0 wt. % nickel; (xxviii) 27.0-28.0 wt. % nickel; (xxix) 28.0-29.0 wt. % nickel; (xxx) 29.0-30.0 wt. % nickel; (xxxi) 30.0-31.0 wt. % nickel; (xxxii) 31.0-32.0 wt. % nickel; (xxxiii) 32.0-33.0 wt. % nickel; (xxxiv) 33.0-34.0 wt. % nickel; (xxxv) 34.0-35.0 wt. % nickel; (xxxvi) 35.0-36.0 wt. % nickel; (xxxvii) 36.0-37.0 wt. % nickel; (xxxviii) 37.0-38.0 wt. % nickel; (xxxix) 38.0-39.0 wt. % nickel; (xl) 39.0-40.0 wt. % nickel; (xli) 40.0-41.0 wt. % nickel; (xlii) 41.0-42.0 wt. % nickel; (xliii) 42.0-43.0 wt. % nickel; (xliv) 43.0-44.0 wt. % nickel; (xlv) 44.0-45.0 wt. % nickel; (xlvi) 45.0-46.0 wt. % nickel; or (xlvii) >46.0 wt. % nickel.

### Claim 8 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 0-1.0 wt. % molybdenum; (ii) 1.0-2.0 wt. % molybdenum; (iii) 2.0-3.0 wt. % molybdenum; (iv) 3.0-4.0 wt. % molybdenum; (v) 4.0-5.0 wt. % molybdenum; (vi) 5.0-6.0 wt. % molybdenum; (vii) 6.0-7.0 wt. % molybdenum; (viii) 7.0-8.0 wt. % molybdenum; or (ix) >8.0 wt. % molybdenum.

### Claim 9 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 0-1.0 wt. % copper; (ii) 1.0-2.0 wt. % copper; (iii) 2.0-3.0 wt. % copper; (iv) 3.0-4.0 wt. % copper; or (v) >4.0 wt. % copper.

### Claim 10 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone comprises stainless steel or an alloy comprising:
(i) 0.01-1.0 wt. % X; (ii) 1.0-2.0 wt. % X; (iii) 2.0-3.0 wt. % X; (iv) 3.0-4.0 wt. % X; or (v) >4.0 wt. % X;
wherein X comprises cobalt or tantalum or aluminium or titanium or niobium or silicon or manganese or tungsten or phosphorous.

### Claim 11 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone or said cone-gas cone forms an interface between an atmospheric pressure ion source and a first vacuum chamber of said mass spectrometer.

### Claim 12 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said sampling cone comprises a first or inner conical or frusto-conical body defining a first orifice or circular aperture through which ions pass in use.

### Claim 13 (depends on 12)

A mass spectrometer as claimed in claim 12, wherein said first coating or surface is provided on:
(i) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an outer surface of said first or inner conical or frusto-conical body; or
(ii) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an inner surface of said first or inner conical or frusto-conical body.

### Claim 14 (depends on 12)

Amass spectrometer as claimed in claim 12, wherein said cone-gas cone comprises a second or outer conical or frusto-conical body defining a second orifice or annular aperture through which a cone gas emerges, in use, and wherein said second orifice or annular aperture substantially circumscribes at least part or substantially the whole of said first orifice or circular aperture.

### Claim 15 (depends on 14)

A mass spectrometer as claimed in claim 14, wherein said first coating or surface is provided on:
(i) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an outer surface of said second or outer conical or frusto-conical body; or
(ii) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an inner surface of said second or outer conical or frusto-conical body.

### Claim 16

A mass spectrometer comprising an extraction cone, wherein said extraction cone comprises a first coating or surface provided on at least a portion of said extraction cone, wherein said first coating or surface comprises a metallic boride coating or surface.

### Claim 17 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone is made from a material selected from the group consisting of: (i) stainless steel; (ii) a steel alloy comprising ≧11.5% chromium wt. %; (iii) an austenitic stainless steel; (iv) a ferritic stainless steel; (v) an austenitic-ferritic or duplex steel; (vi) titanium; (vii) a titanium alloy; (viii) a nickel-base alloy; (ix) a nickel-chromium alloy; and (x) a nickel-chromium alloy comprising ≧50.0% nickel wt. %.

### Claim 18 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 0-0.01 wt. % carbon; (ii) 0.01-0.02 wt. % carbon; (iii) 0.02-0.03 wt. % carbon; (iv) 0.03-0.04 wt. % carbon; (v) 0.04-0.05 wt. % carbon; (vi) 0.05-0.06 wt. % carbon; (vii) 0.06-0.07 wt. % carbon; (viii) 0.07-0.08 wt. % carbon; or (ix) >0.08 wt. % carbon.

### Claim 19 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 0-0.01 wt. % nitrogen; (ii) 0.01-0.02 wt. % nitrogen; (iii) 0.02-0.03 wt. % nitrogen; (iv) 0.03-0.04 wt. % nitrogen; (v) 0.04-0.05 wt. % nitrogen; (vi) 0.05-0.06 wt. % nitrogen; (vii) 0.06-0.07 wt. % nitrogen; or (viii) >0.07 wt. % nitrogen.

### Claim 20 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 0-0.1 wt. % nitrogen; (ii) 0.1-0.2 wt. % nitrogen; (iii) 0.2-0.3 wt. % nitrogen; (iv) 0.3-0.4 wt. % nitrogen; (v) 0.4-0.5 wt. % nitrogen; (vi) 0.5-0.6 wt. % nitrogen; (vii) 0.6-0.7 wt. % nitrogen; or (viii) >0.7 wt. % nitrogen.

### Claim 21 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 12.0-13.0 wt. % chromium; (ii) 13.0-14.0 wt. % chromium; 0014.0-15.0 wt. % chromium; (iv) 15.0-16.0 wt. % chromium; (v) 16.0-17.0 wt. % chromium; (vi) 17.0-18.0 wt. % chromium; (vii) 18.0-19.0 wt % chromium; (viii) 19.0-20.0 wt. % chromium; (ix) 20.0-21.0 wt. % chromium; (x) 21.0-22.0 wt. % chromium; (xi) 22.0-23.0 wt. % chromium; (xii) 23.0-24.0 wt. % chromium; (xiii) 24.0-25.0 wt. % chromium; (xiv) 25.0-26.0 wt. % chromium; (xv) 26.0-27.0 wt. % chromium; (xvi) 27.0-28.0 wt. % chromium; (xvii) 28.0-29.0 wt. % chromium; (xviii) 29.0-30.0 wt. % chromium; or (xix) >30.0 wt. % chromium.

### Claim 22 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 0-1.0 wt. % nickel; (ii) 1.0-2.0 wt. % nickel; (iii) 2.0-3.0 wt. % nickel; (iv) 3.0-4.0 wt. % nickel; (v) 4.0-5.0 wt. % nickel; (vi) 5.0-6.0 wt. % nickel; (vii) 6.0-7.0 wt. % nickel; (viii) 7.0-8.0 wt. % nickel; (ix) 8.0-9.0 wt. % nickel; (x) 9.0-10.0 wt. % nickel; (xi) 10.0-11.0 wt. % nickel; (xii) 11.0-12.0 wt % nickel; (xiii) 12.0-13.0 wt. % nickel; (xiv) 13.0-14.0 wt % nickel; (xv) 14.0-15.0 wt. % nickel; (xvi) 15.0-16.0 wt. % nickel; (xvii) 16.0-17.0 wt. % nickel; (xviii) 17.0-18.0 wt. % nickel; (xix) 18.0-19.0 wt. % nickel; (xx) 19.0-20.0 wt. % nickel; (xxi) 20.0-21.0 wt. % nickel; (xxii) 21.0-22.0 wt. % nickel; (xxiii) 22.0-23.0 wt % nickel; (xxiv) 23.0-24.0 wt. % nickel; (xxv) 24.0-25.0 wt. % nickel; (xxvi) 25.0-26.0 wt. % nickel; (xxvii) 26.0-27.0 wt. % nickel; (xxviii) 27.0-28.0 wt. % nickel; (xxix) 28.0-29.0 wt. % nickel; (xxx) 29.0-30.0 wt. % nickel; (xxxi) 30.0-31.0 wt. % nickel; (xxxii) 31.0-32.0 wt. % nickel; (xxxiii) 32.0-33.0 wt. % nickel; (xxxiv) 33.0-34.0 wt. % nickel; (xxxv) 34.0-35.0 wt. % nickel; (xxxvi) 35.0-36.0 wt. % nickel; (xxxvii) 36.0-37.0 wt. % nickel; (xxxviii) 37.0-38.0 wt. % nickel; (xxxix) 38.0-39.0 wt. % nickel; (xl) 39.0-40.0 wt. % nickel; (xli) 40.0-41.0 wt. % nickel; (xlii) 41.0-42.0 wt. % nickel; (xliii) 42.0-43.0 wt. % nickel; (xliv) 43.0-44.0 wt. % nickel; (xlv) 44.0-45.0 wt. % nickel; (xlvi) 45.0-46.0 wt. % nickel; or (xlvii) >46.0 wt. % nickel.

### Claim 23 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 0-1.0 wt. % molybdenum; (ii) 1.0-2.0 wt. % molybdenum; (iii) 2.0-3.0 wt. % molybdenum; (iv) 3.0-4.0 wt. % molybdenum; (v) 4.0-5.0 wt. % molybdenum; (vi) 5.0-6.0 wt. % molybdenum; (vii) 6.0-7.0 wt. % molybdenum; (viii) 7.0-8.0 wt. % molybdenum; or (ix) >8.0 wt. % molybdenum.

### Claim 24 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 0-1.0 wt. % copper; (ii) 1.0-2.0 wt. % copper; (iii) 2.0-3.0 wt. % copper; (iv) 3.0-4.0 wt. % copper; or (v) >4.0 wt. % copper.

### Claim 25 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises stainless steel or an alloy comprising:
(i) 0.01-1.0 wt. % X; (ii) 1.0-2.0 wt. % X; (iii) 2.0-3.0 wt. %); (iv) 3.0-4.0 wt. % X; or (v) >4.0 wt. % X;
wherein X comprises cobalt or tantalum or aluminium or titanium or niobium or silicon or manganese or tungsten or phosphorous.

### Claim 26 (depends on 16)

Amass spectrometer as claimed in claim 16, wherein said extraction cone forms an interface between a first or further vacuum chamber of said mass spectrometer and a second or further vacuum chamber of said mass spectrometer.

### Claim 27 (depends on 16)

A mass spectrometer as claimed in claim 16, wherein said extraction cone comprises a first or inner conical or frusto-conical body defining a first orifice or circular aperture through which ions pass in use.

### Claim 28 (depends on 27)

A mass spectrometer as claimed in claim 27, wherein said first coating or surface is provided on:
(i) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an outer surface of said first or inner conical or frusto-conical body; or
(ii) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an inner surface of said first or inner conical or frusto-conical body.

### Claim 29 (depends on 27)

A mass spectrometer as claimed in claim 27, wherein said extraction cone further comprises a second or outer conical or frusto-conical body defining a second orifice or annular aperture, wherein said second orifice or annular aperture substantially circumscribes at least part or substantially the whole of said first orifice or circular aperture.

### Claim 30 (depends on 29)

A mass spectrometer as claimed in claim 29, wherein said first coating or surface is provided on:
(i) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an outer surface of said second or outer conical or frusto-conical body; or
(ii) at least 5%, 10%, 15%, 20%, 25%, 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95% or 100% of an inner surface of said second or outer conical or frusto-conical body.

### Claim 31 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said first coating or surface is selected from the group consisting of: (i) aluminium diboride, aluminium dodecaboride, AlB2 or AlB12; (ii) chromium diboride or CrB2; (iii) copper boride; (iv) hafnium diboride or HfB2; (v) iridium boride; (vi) iron boride, FeB or Fe2B; (vii) manganese boride, manganese diboride, MnB or MnB2; (viii) molybdenum diboride or MoB2; (ix) nickel boride, NiB, Ni2B or Ni3B; (x) niobium diboride or NbB2; (xi) osmium boride; (xii) palladium boride; (xiii) platinum boride; (xiv) rhenium boride; (xv) rhodium boride; (xvi) ruthenium boride; (xvii) scandium boride or ScB; (xviii) silicon hexaboride, silicon tetraboride, SiB6 or SiB4; (xix) tantalum diboride or TaB2; (xx) titanium diboride or TiB2; (xxi) tungsten diboride or WB2; (xxii) vanadium diboride or VB2; (xxiii) yttrium boride; and (xxiv) zirconium diboride or ZrB2.

### Claim 32 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said first coating or surface comprises: (i) a transition metal boride or diboride; (ii) a boride or diboride alloy; or (iii) a mixed metal boride or diboride alloy.

### Claim 33 (depends on 1)

A mass spectrometer as claimed in claim 1, wherein said first coating or surface has either:
(a) a resistivity selected from the group consisting of: (i) <10−3 Ω-m; (ii) <10−4 Ω-m; (iii) <10−5 Ω-m; (v) <10−6 Ω-m; (v) <10−7 Ω-m; (vi) 10−3-10−4 Ω-m; (vii) 10−4-10−5 Ω-m; (viii) 10−5-10−6 Ω-m; and (ix) 10−6-10−7 Ω-m; or
(b) a Vickers hardness number or Vickers Pyramid Number (HV) selected from the group consisting of: (i) >1000; (ii) 1000-1100; (iii) 1100-1200; (iv) 1200-1300; (v) 1300-1400; (vi) 1400-1500; (vii) 1500-1600; (viii) 1600-1700; (ix) 1700-1800; (x) 1800-1900; (xi) 1900-2000; (xii) 2000-2100; (xiii) 2100-2200; (xiv) 2200-2300; (xv) 2300-2400; (xvi) 2400-2500; (xvii) 2500-2600; (xviii) 2600-2700; (xix) 2700-2800; (xx) 2800-2900; (xxi) 2900-3000; (xxii) 3000-3100; (xxiii) 3100-3200; (xxiv) 3200-3300; (xv) 3300-3400; (xvi) 3400-3500; and (xvii) >3500, wherein said Vickers hardness number or Vickers Pyramid Number is determined at a load of 30, 40, 50, 60 or 70 kg; or
(c) a Vickers microhardness selected from the group consisting of: (i) >1000 kg/mm; (ii) 1000-1100 kg/mm; (iii) 1100-1200 kg/mm; (iv) 1200-1300 kg/mm; (v) 1300-1400 kg/mm; (vi) 1400-1500 kg/mm; (vii) 1500-1600 kg/mm; (viii) 1600-1700 kg/mm; (ix) 1700-1800 kg/mm; (x) 1800-1900 kg/mm; (xi) 1900-2000 kg/mm; (xii) 2000-2100 kg/mm; (xiii) 2100-2200 kg/mm; (xiv) 2200-2300 kg/mm; (xv) 2300-2400 kg/mm; (xvi) 2400-2500 kg/mm; (xvii) 2500-2600 kg/mm; (xviii) 2600-2700 kg/mm; (xix) 2700-2800 kg/mm; (xx) 2800-2900 kg/mm; (xxi) 2900-3000 kg/mm; (xxii) 3000-3100 kg/mm; (xxiii) 3100-3200 kg/mm; (xxiv) 3200-3300 kg/mm; (xv) 3300-3400 kg/mm; (xvi) 3400-3500 kg/mm; and (xvii) >3500 kg/mm, or
(d) a thickness selected from the group consisting of: (i) <1 μm; (ii) 1-2 μm; (iii) 2-3 μm; (iv) 3-4 μm; (v) 4-5 μm; (vi) 5-6 μm; (vii) 6-7 μm; (viii) 7-8 μm; (ix) 8-9 μm; (x) 9-10 μm; (xi) >10 μm; or
(e) a density selected from the group consisting of: (i) <3.0 g cm−3; (ii) 3.0-3.5 g cm−3; (iii) 3.5-4.0 g cm−3; (iv) 4.0-4.5 g cm−3; (v) 4.5-5.0 g cm−3; (vi) 5.0-5.5 g cm−3; (vii) 5.5-6.0 g cm−3; (viii) 6.0-6.5 g cm−3; (ix) 6.5-7.0 g cm−3; (x) 7.0-7.5 g cm−3; (xi) 7.5-8.0 g cm−3; (xii) 8.0-8.5 g cm−3; (xiii) 8.5-9.0 g cm−3; (xiv) 9.0-9.5 g cm−3; (xv) 9.5-10.0 g cm−3; (xvi) 10.0-10.5 g cm−3; (xvii) 10.5-11.0 g cm−3; (xviii) 11.0-11.5 g cm−3; (xix) 11.5-12.0 g cm−3; (xx) 12.0-12.5 g cm−3; (xxi) 12.5-13.0 g cm−3; (xxii) 13.0-13.5 g cm−3; (xxiii) 13.5-14.0 g cm−3; (xxiv) 14.0-14.5 g cm−3; (xxv) 14.5-15.0 g cm−3; (xxvi) 15.0-15.5 g cm−3; (xxvii) 15.5-16.0 g cm−3; (xxviii) 16.0-16.5 g cm−3; (xxix) 16.5-17.0 g cm−3; (xxx) 17.0-17.5 g cm−3; (xxxi) 17.5-18.0 g cm−3; (xxxii) 1810-18.5 g cm−3; (xxxiii) 18.5-19.0 g cm−3; (xxxiv) 19.0-19.5 g cm−3; (xxxv) 19.5-20.0 g cm−3; and (xxxvi) >20.0 g cm−3; or
(f) a coefficient of friction selected from the group consisting of: (i) <0.01; (ii) 0.01-0.02; (iii) 0.02-0.03; (iv) 0.03-0.04; (v) 0.04-0.05; (vi) 0.05-0.06; (vii) 0.06-0.07; (viii) 0.07-0.08; (ix) 0.08-0.09; (x) 0.09-0.10; and (xi) >0.1.

### Claim 34

A method of mass spectrometry comprising:
passing ions through a sampling cone or a cone-gas cone of a mass spectrometer, wherein said sampling cone or said cone-gas cone comprises a first coating or surface provided on at least a portion of said sampling cone or said cone-gas cone, wherein said first coating or surface comprises a metallic boride coating or surface.

### Claim 35

A method of mass spectrometry comprising:
passing ions through an extraction cone of a mass spectrometer, wherein said extraction cone comprises a first coating or surface provided on at least a portion of said extraction cone, wherein said first coating or surface comprises a metallic boride coating or surface.

### Claim 36

A method of making a sampling cone or a cone-gas cone for a mass spectrometer comprising:
depositing, sputtering or forming a first coating or surface on at least a portion of a sampling cone or a cone-gas cone of a mass spectrometer, wherein said first coating or surface comprises a metallic boride coating or surface.

### Claim 37

A method of making an extraction cone for a mass spectrometer comprising:
depositing, sputtering or forming a first coating or surface on at least a portion of an extraction cone of a mass spectrometer, wherein said first coating or surface comprises a metallic boride coating or surface.

### Claim 38 (depends on 36)

A method as claimed in claim 36, wherein said step of depositing, sputtering or forming said first coating or surface comprises using a method selected from the group consisting of: (i) magnetron sputtering; (ii) closed field unbalanced magnetron sputter ion plating; (iii) electroplating; (iv) thermal spray coating; (v) vapour deposition; (vi) Chemical Vapour Deposition (“CVD”); (vii) combustion torch/flame spraying; (viii) electric arc spraying; (ix) plasma spraying; (x) ion plating; (xi) ion implantation; (xii) sputtering; (xiii) sputter deposition; (xiv) laser surface alloying; (xv) Physical Vapour Deposition (“PVD”); (xvi) plasma-based ion plating; (xvii) gas plasma discharge sputtering; (xviii) laser cladding; (xix) plasma enhanced Chemical Vapour Deposition; (xx) low pressure Chemical Vapour Deposition; (xxi) laser enhanced Chemical Vapour Deposition; (xxii) active reactive evaporation; (xxiii) Pulsed Laser Deposition (“PLD”); (xxiv) RF-sputtering; (xxv) Ion-Beam Sputtering (“IBS”); (xxvi) reactive sputtering; (xxvii) Ion-Assisted Deposition (“IAD”); (xxviii) high target utilisation sputtering; (xxix) High Power Impulse Magnetron Sputtering (“HIPIMS”); and (xxx) DC-sputtering.

### Claim 39 (depends on 34)

A method as claimed in claim 34, wherein said first coating or surface is selected from the group consisting of: (i) aluminium diboride, aluminium dodecaboride, AlB2 or AlB12; (ii) chromium diboride or CrB2; (iii) copper boride; (iv) hafnium diboride or HfB2; (v) iridium boride; (vi) iron boride, FeB or Fe2B; (vii) manganese boride, manganese diboride, MnB or MnB2; (viii) molybdenum diboride or MoB2; (ix) nickel boride, NiB, Ni2B or Ni3B; (x) niobium diboride or NbB2; (xi) osmium boride; (xii) palladium boride; (xiii) platinum boride; (xiv) rhenium boride; (xv) rhodium boride; (xvi) ruthenium boride; (xvii) scandium boride or ScB; (xviii) silicon hexaboride, silicon tetraboride, SiB6 or SiB4; (xix) tantalum diboride or TaB2; (xx) titanium diboride or TiB2; (xxi) tungsten diboride or WB2; (xxii) vanadium diboride or VB2; (xxiii) yttrium boride; and (xxiv) zirconium diboride or ZrB2.

### Claim 40 (depends on 34)

A method as claimed in claim 34, wherein said first coating or surface comprises: (i) a transition metal boride or diboride; (ii) a boride or diboride alloy; or (iii) a mixed metal boride or diboride alloy.