# US 8,785,839 B2 · Optical sensor and method of manufacturing the optical sensor

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- Number: US 8,785,839 B2
- Document ID: US8785839B2
- Status: Granted
- Kind: B2
- Application number: 13/433,418
- Filed: 2012-03-29
- Published: 2012-10-04
- Granted: 2014-07-22
- Earliest claimed: 2011-03-31
- Assignees: Seiko Instruments Inc.
- Applicants: Hitoshi Takeuchi; Noriyuki Kimura; Koji Noguchi
- Inventors: Hitoshi Takeuchi; Noriyuki Kimura; Koji Noguchi
- Web page: https://patentgrep.com/patent/US8785839B2

## CPC

- H10F 77/93: {Interconnections}
- G01J 1/0214: {Constructional arrangements for removing stray light}
- G01J 1/0271: {Housings; Attachments or accessories for photometers}
- G01J 1/0407: {Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings}
- G01J 1/0437: {using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters}
- G01J 1/0488: {with spectral filtering}
- G01J 1/4204: {with determination of ambient light (solar light G01J2001/4266)}
- G01J 5/041: {Mountings in enclosures or in a particular environment}
- G01J 5/045: {Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements (getter arrangements per se H10W76/48, H10P36/03)}
- H10F 77/50: Encapsulations or containers (for photovoltaic modules H10F19/80)
- H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL}
- Y10T 29/49826: Assembling or joining
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

An optical sensor has a glass base having a concave portion, and a glass lid is bonded to the base and overlies the concave portion to form a cavity portion. A photoelectric conversion element id accommodated in the cavity portion. Internal wirings are each connected at one end to the photoelectric conversion element and extend through notches each formed at a corner of a peripheral edge along an outside surface of the base. The other ends of the internal wirings are connected inside the notches to external wirings that extend along an outside surface of the base and terminate in external terminals.

## Claims

### Claim 1

An optical sensor, comprising:
a base made of a glass material and having a substantially plate shape, a concave portion formed in a surface of the base, and a plurality of notches each formed at a corner of a peripheral edge along an outside surface of the base;
a lid portion made of a glass material, the lid portion having a flat plate shape and being stacked and bonded onto the surface of the base so as to close the concave portion to form a cavity portion;
an optical element having a light receiving portion for receiving light, the optical element being disposed on a back surface of the lid portion opposite to the base so that the light receiving portion faces the back surface of the lid portion, and the optical element being configured to photoelectrically convert light transmitted through the lid portion and received by the light receiving portion;
a plurality of internal wirings formed on the back surface of the lid portion opposed to the base, the plurality of internal wirings each including an element connection portion connected to the optical element and a wiring connection portion disposed at a position opposed to a corresponding one of the plurality of notches of the base; and
a plurality of external wirings disposed along a surface of the corresponding one of the plurality of notches so that one end is connected to the wiring connection portion of a corresponding one of the plurality of internal wirings and another end is exposed on a surface of the base on an opposite side of the lid portion.

### Claim 2 (depends on 1)

An optical sensor according to claim 1, wherein:
the base is made of a light-blocking glass material; and
the lid portion includes, at least on the surface opposed to the base, an optical filter for limiting a wavelength of light to be transmitted.

### Claim 3 (depends on 1)

An optical sensor according to claim 1, wherein:
the base is made of a light-blocking glass material; and
the lid portion is made of a light-blocking glass material having a transmission region through which light transmits, the transmission region being provided in a range in which the light receiving portion of the optical element faces the lid portion.

### Claim 4

A method of manufacturing an optical sensor, comprising:
forming an internal wiring on a back surface of a lid member having a flat plate shape and made of a glass material;
mountings a photoelectric conversion element on the back surface of the lid member so that a light receiving portion of the photoelectric conversion element faces the back surface of the lid member, and connecting the photoelectric conversion element to the internal wiring;
stacking the lid member onto which the photoelectric conversion element is mounted onto a base member having a substantially plate shape and made of a glass material, the base member including a concave portion in a surface thereof and a plurality of notches each formed at a corner of a peripheral edge along an outside surface from the peripheral edge to a bottom of the outside surface, and accommodating the photoelectric conversion element in the concave portion of the base member, followed by bonding the lid member and the base member to each other so that the lid member closes the concave portion; and
forming an external wiring along a surface of each of the plurality of notches of the base member onto which the lid member is bonded so that one end of the external wiring is connected to the internal wiring and another end of the external wiring is exposed on a surface of the base member on an opposite side of the lid member.

### Claim 5 (depends on 4)

A method of manufacturing an optical sensor according to claim 4, wherein the plurality of notches are formed at corner portions of the base member, respectively, and another end of the internal wiring is disposed at each corner portion of the lid member.

### Claim 6 (depends on 4)

A method of manufacturing an optical sensor according to claim 4, wherein the base member is made of a light-blocking glass material; and wherein the lid member includes, at least on the surface opposed to the base member, an optical filter for limiting a wavelength of light to be transmitted.

### Claim 7 (depends on 4)

A method of manufacturing an optical sensor according to claim 4, wherein the base member is made of a light-blocking glass material; and wherein the lid member is made of a light-blocking glass material having a transmission region through which light transmits, the transmission region being provided in a range in which the light receiving portion of the optical element faces the lid member.

### Claim 8

An optical sensor comprising:
a glass base having a concave portion and a plurality of notches each formed at a corner of a peripheral edge along an outside surface of the glass base;
a glass lid bonded to the base and overlying the concave portion to form a cavity portion;
a photoelectric conversion element accommodated in the cavity portion and having a light receiving portion for receiving light, the photoelectric conversion element being configured to photoelectrically convert light that is transmitted through the lid and received by the light receiving portion;
a plurality of internal wirings each having one end connected to the photoelectric conversion element and another end disposed at a position opposed to a corresponding one of the plurality of notches of the base; and
a plurality of external wirings each having one end connected to the another end of a corresponding one of the plurality of internal wirings and having another end exposed on a surface of the base disposed on an opposite side of the lid.

### Claim 9 (depends on 8)

An optical sensor according to claim 8, wherein the optical element is disposed on a rear surface of the lid member confronting the concave portion of the base member so that the light receiving portion faces the rear surface of the lid member.

### Claim 10 (depends on 8)

An optical sensor according to claim 8, wherein the internal wirings are formed on a rear surface of the lid member opposed to the base member.

### Claim 11 (depends on 8)

An optical sensor according to claim 8, wherein the external wirings are disposed along a surface of respective ones of the plurality of notches formed on the base member.

### Claim 12 (depends on 8)

An optical sensor according to claim 8, wherein the base member has a plate shape and is made of a glass material.

### Claim 13 (depends on 12)

An optical sensor according to claim 12, wherein the glass material comprises a light-blocking glass material.

### Claim 14 (depends on 13)

An optical sensor according to claim 13, wherein the lid member has an optical filter for limiting a wavelength of light that is transmitted through the lid member.

### Claim 15 (depends on 13)

An optical sensor according to claim 13, wherein the lid member is made of a light-blocking glass material having a transmission region through which light transmits, the transmission region being provided in a range in which the light receiving portion of the optical element faces the rear surface of the lid member.
