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US 8,785,812 B2Granted
Table for receiving a workpiece and method for processing a workpiece on such table
AssigneeTel Solar AG
InventorsRichard Grundmüller, Johannes Meier, Arthur Büchel
Life of this patent
Estimating the term…
Abstract
The present invention relates to a device for the treatment of a workpiece, in particular of a substantially flat substrate, comprising a table (2) for supporting the workpiece (5), a flow generation apparatus (6, 11) producing a gas flow (22) on a top face (17.1, 17.2) of the table (2) in a region between the workpiece (5) and the top face (17.1, 17.2) of the table (2), on which gas flow the workpiece (5) is supported during the treatment.
Claims20
A device for processing a workpiece, comprising:
- a table having a flat support surface for holding the workpiece where the support surface comprises at least two surface sections which follow one another in a longitudinal direction and are separated by a gap running transversely to the longitudinal direction and where, in each surface section, outflow orifices for feeding compressed gas for producing a gas cushion between each said surface section and a bottom of the workpiece are distributed over the surface sections;
- a feed apparatus and a receptacle for the workpiece and a drive device suitable for displacing the receptacle in the longitudinal direction across the gap;
- a processing device for processing the workpiece, the processing device comprising at least one laser unit directed towards the gap;
- at least one detector for markings, the detector being used for controlling the position of the workpiece, the workpiece having thereon, a plurality of said markings that are detected by the detector to establish a position of the workpiece relative to the table or to the processing device;
- and
- a plurality of groups of orifices arranged in a row in succession over an entire width of the table, each group of orifices having a take-off orifice and an outflow orifice which surrounds the take-off orifice.
3 more elements
A device for processing a workpiece, comprising:
- a table having a flat support surface for holding the workpiece where the support surface comprises at least two surface sections which follow one another in a longitudinal direction and are separated by a gap running transversely to the longitudinal direction and where, in each surface section, outflow orifices for feeding compressed gas for producing a gas cushion between each said surface section and a bottom of the workpiece are distributed over the surface sections;
- a feed apparatus and a receptacle for the workpiece and a drive device suitable for displacing the receptacle in the longitudinal direction across the gap;
- a processing device for processing the workpiece, the processing device comprising at least one laser unit directed towards the gap;
- at least one detector for markings, the detector being used for controlling the position of the workpiece, the workpiece having thereon, a plurality of said markings that are detected by the detector to establish a position of the workpiece relative to the table or to the processing device;
- the at least one detector being arranged in the gap or above the gap;
- and
- a plurality of groups of orifices arranged in a row in succession over an entire width of the table, each group of orifices having a take-off orifice and an outflow orifice which surrounds the take-off orifice.
4 more elements
A device for processing a workpiece, comprising:
- a table having a flat support surface for holding the workpiece where the support surface comprises at least two surface sections which follow one another in a longitudinal direction and are separated by a gap running transversely to the longitudinal direction and where, in each surface section outflow orifices for feeding compressed gas for producing a gas cushion between each said surface section and a bottom of the workpiece are distributed over the surface sections;
- a feed apparatus and a receptacle for the workpiece and a drive device suitable for displacing the receptacle in the longitudinal direction across the gap;
- a processing device for processing the workpiece, the processing device comprising at least one laser unit directed towards the gap;
- at least one detector for markings, the detector being used for controlling the position of the workpiece, the workpiece having thereon, a plurality of said markings that are detected by the detector to establish the position of the workpiece relative to the table or to the processing device;
- and
- a plurality of groups of orifices arranged in a row in succession over an entire width of the table, each group of orifices having a take-off orifice and an outflow orifice which surrounds the take-off orifice, the take-off orifices removing said compressed gas from between the bottom of the workpiece and a respective surface section adjacent the groups of orifices.
3 more elements
Dependencies are inferred from the claim text.