# US 8,785,810 B2 · Laser optical system, repair apparatus and method using the same

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- Number: US 8,785,810 B2
- Document ID: US8785810B2
- Status: Granted
- Kind: B2
- Application number: 13/279,716
- Filed: 2011-10-24
- Published: 2012-05-03
- Granted: 2014-07-22
- Earliest claimed: 2010-10-27
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Jeong Woo Hyun; Jung Sub Lee; Sung Jin Lee; Sang Kyu Lim; Kwang Soo Kim; Jae Kwang Lee
- Inventors: Jeong Woo Hyun; Jung Sub Lee; Sung Jin Lee; Sang Kyu Lim; Kwang Soo Kim; Jae Kwang Lee
- Web page: https://patentgrep.com/patent/US8785810B2

## CPC

- B23K 26/02: Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K 26/0648: {comprising lenses}
- B23K 26/082: Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
- G02F 1/1309: {Repairing; Testing}
- B23K 26/08: Devices involving relative movement between laser beam and workpiece
- G02B 7/02: for lenses {(supports for magnifying lenses G02B25/002)}
- G02F 1/1303: {Apparatus specially adapted to the manufacture of LCDs}
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

According to example embodiments, a laser optical system includes a laser generator, at least one scan module, an objective lens, a relay lens, a review optical system, and a control device. The laser generator is configured to generate a laser beam. The at least one scan module is configured to reflect the laser beam generated by the laser generator and to direct the laser beam in different directions. The objective lens is configured to focus the laser beam on a substrate. The relay lens is configured to guide the laser beam scanned by the at least one scan module to within an incident range of the objective lens. The review optical system is configured to monitor, in real time, repair of the substrate using the laser beam. The control device is configured to control the at least one scan module.

## Claims

### Claim 1

A laser optical system comprising:
a laser generator configured to generate a laser beam;
at least one scan module configured to reflect the laser beam generated by the laser generator and to direct the laser beam in different directions;
an objective lens configured to focus the laser beam on a substrate;
a relay lens configured to guide the laser beam scanned by the at least one scan module to within an incident range of the objective lens;
a review optical system configured to monitor, in real time, repair of the substrate using the laser beam; and
a control device configured to control the at least one scan module.

### Claim 2 (depends on 1)

The laser optical system according to claim 1, wherein the relay lens is between the at least one scan module and the objective lens and an optical space is between the at least one scan module and the objective lens, the optical space enabling display of the repair of the substrate using the review optical system in real time.

### Claim 3 (depends on 2)

The laser optical system according to claim 2, wherein the substrate is a Liquid Crystal Display (LCD) and the laser beam repairs defects of the LCD.

### Claim 4 (depends on 3)

The laser optical system according to claim 3, wherein the objective lens is configured to compress the laser beam to a pixel size of the LCD.

### Claim 5 (depends on 4)

The laser optical system according to claim 4, wherein the at least one scan module is configured to change a travel direction of the laser beam into at least two different directions.

### Claim 6 (depends on 5)

The laser optical system according to claim 5, wherein
the at least two different directions are an X axis direction and a Y axis direction,
the at least one scan module includes at least two scan mirrors,
the at least two scan mirrors are configured to continuously scan the laser beam, and
one of the at least two scan mirrors scans the laser beam along the X axis direction and the other scan mirror of the at least two scan mirrors scans the laser beam along the Y axis direction.

### Claim 7 (depends on 5)

The laser optical system according to claim 5, including at least two scan modules, wherein
each scan module of the at least two scan modules includes one scan mirror,
one scan module of the at least two scan modules scans the laser beam along an X axis direction and the other scan module of the at least two scan modules scans the laser beam along a Y axis direction.

### Claim 8 (depends on 5)

The laser optical system according to claim 5, wherein the at least one scan module includes one scan mirror, the scan mirror configured to scan the laser beam along X and Y axes directions.

### Claim 9 (depends on 5)

The laser optical system according to claim 5, wherein the control device is configured to control a position of a spot of the laser beam emitted from the objective lens on the substrate.

### Claim 10 (depends on 9)

The laser optical system according to claim 9, wherein the review optical system includes,
an illumination device configured to provide illumination during monitoring of the repair,
an auto focusing device configured to correct a focus of the laser optical system or the review optical system, and
a review camera configured to monitor the repair of the LCD in real time.

### Claim 11 (depends on 1)

The laser optical system according to claim 1, further comprising:
a tube lens configured to be detachably provided such that the laser optical system can be switched between an image-to-image optical system and a spot optical system.

### Claim 12 (depends on 11)

The laser optical system according to claim 11, wherein the laser optical system is configured to function as an image-to-image optical system when the tube lens is included between the laser generator and the scan module and is configured to function as a spot optical system when the tube lens is not included.

### Claim 13 (depends on 1)

A repair apparatus, comprising:
the laser optical system according to claim 1;
a gantry configured to include the laser optical system mounted thereon;
a stage configured to have the substrate placed thereon; and
a monitor configured to display a result of the monitoring by the review optical system.

### Claim 14

A repair method, comprising:
generating a laser beam to repair a substrate;
reflecting the generated laser beam using at least one scan module to direct the laser beam in different directions;
focusing the laser beam on the substrate using an objective lens;
guiding the scanned laser beam using a relay lens to within an incident range of the objective lens;
monitoring repair of the substrate in real time using a review optical system; and
displaying a result of the monitoring in real time.