# US 8,785,296 B2 · Packaging method with backside wafer dicing > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,785,296 B2 - Document ID: US8785296B2 - Status: Granted - Kind: B2 - Application number: 13/396,531 - Filed: 2012-02-14 - Published: 2013-08-15 - Granted: 2014-07-22 - Earliest claimed: 2012-02-14 - Assignees: Alpha and Omega Semiconductor Incorporated - Applicants: Yan Xun Xue; Ping Huang; Yueh-Se Ho - Inventors: Yan Xun Xue; Ping Huang; Yueh-Se Ho - Web page: https://patentgrep.com/patent/US8785296B2 ## CPC - H10W 74/014: {using batch processing} - H10D 62/117: {Shapes of semiconductor bodies} - H10P 72/74: {using temporarily an auxiliary support} - H10P 72/7402: {Wafer tapes, e.g. grinding or dicing support tapes} - H10W 74/019: {using temporary auxiliary substrates (H10W74/017 takes precedence)} - H10P 72/7416: {used during dicing or grinding} - H10P 72/7422: {used to protect an active side of a device or wafer} - H10W 72/01904: {using temporary auxiliary members, e.g. using sacrificial coatings or handle substrates} - H10W 72/0198: {batch processes} - H10W 74/129: {forming a chip-scale package [CSP]} - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A packaging method with backside wafer dicing includes the steps of forming a support structure at the front surface of the wafer then depositing a metal layer on a center area of the backside of the wafer after grinding the wafer backside to reduce the wafer thickness; detecting from the backside of the wafer sections of scribe lines formed in the front surface in the region between the edge of the metal layer and the edge of the wafer and cutting the wafer and the metal layer from the wafer backside along a straight line formed by extending a scribe line section detected from the wafer backside. ## Claims ### Claim 1 A packaging method with backside wafer dicing, wherein an active area of a semiconductor wafer comprises multiple semiconductor chips spaced-apart by scribe lines located at a front surface of the wafer, the method comprises the steps of: forming a support structure at the front surface of the wafer; grinding a backside opposite the front surface of the wafer to reduce a thickness of the wafer; depositing a metal layer on a centre area of the backside of the wafer after grinding, wherein a radius of the metal layer is less than a radius of the active area, thus forming a ring of bare wafer in the region between the edge of the metal layer and the edge of the wafer, wherein each scribe line in the front surface extending at least from a projection of the edge of the metal layer to the edge of the active area; detecting the scribe lines from the backside of the wafer; and cutting the wafer and the metal layer from the wafer backside along a straight line formed by extending a scribe line section detected from the wafer backside. ### Claim 2 (depends on 1) The method of claim 1, wherein the support structure comprises a plastic molding material, and wherein the step of cutting the wafer and the metal layer further cutting the plastic molding material forming a top plastic package layer at the front surface of each chip. ### Claim 3 (depends on 1) The method of claim 1, wherein the support structure comprises an adhesive membrane. ### Claim 4 (depends on 1) The method of claim 1, wherein the step of grinding the wafer backside grinds the entire wafer backside to a uniform thickness thin wafer. ### Claim 5 (depends on 1) The method of claim 1, wherein the process of cutting the wafer and the metal layer from the wafer backside further comprising a step of cutting the wafer and the metal layer from the wafer backside along a straight line overlapping with extensions of two separate scribe line sections detected from the wafer backside. ### Claim 6 (depends on 1) The method of claim 1, wherein the step of cutting the wafer and the metal layer further comprising a step of providing a plurality of first cutting grooves separating each of the multiple chips with a portion of the metal layer located at the backside of each chip; the method further comprising: forming a plastic molding layer covering the metal layer and filling into the first cutting grooves; cutting the plastic molding layer from the wafer backside along a center of each of the first cutting groove forming a second cutting groove within each of the first cutting groove separating each of the multiple chips with a backside plastic package layer formed of a portion of the plastic molding layer covering the metal layer of each chip. ### Claim 7 (depends on 6) The method of claim 6, wherein the support structure comprises plastic molding material and is cut into a plurality of top plastic package layers each located at the front surface of each chip. ### Claim 8 (depends on 6) The method of claim 6, wherein the support structure comprises an adhesive membrane. ### Claim 9 (depends on 6) The method of claim 6, wherein a width of the second cutting grooves is narrower than that of the first cutting grooves, wherein a residue of the plastic molding material in the first cutting grooves covering the sidewalls of the chips. ### Claim 10 (depends on 6) The method of claim 6, wherein a width of the second cutting grooves is the same as that of the first cutting grooves. ### Claim 11 A packaging method with backside wafer dicing, wherein an active area of the wafer comprises a plurality of semiconductor chips spaced-apart by scribe lines located at a front surface of the wafer, the method comprises the steps of: forming a support structure at the front surface of the wafer; grinding a centre portion of a backside opposite the front surface of the wafer to form a cavity having a radius less than that of the active area of the wafer, wherein a ring is formed at the backside of the wafer in the region between the side wall of the cavity and the edge of the wafer; depositing a metal layer on a bottom of the cavity, wherein each scribe line in the front surface extending at least from a projection of the edge of the metal layer to the edge of the active area; detecting the scribe lines from the backside of the wafer; and cutting the wafer and the metal layer from the wafer backside along a straight line formed by extending a scribe line section detected from the wafer backside. ### Claim 12 (depends on 11) The method of claim 11, wherein the support structure comprises a plastic molding material, and wherein the step of cutting the wafer and the metal layer further cutting the plastic molding material forming a top plastic package layer at the front surface of each chip. ### Claim 13 (depends on 11) The method of claim 11, wherein the support structure comprises an adhesive membrane. ### Claim 14 (depends on 11) The method of claim 11, wherein a thickness of the metal layer deposited on the bottom of the cavity is substantially the same as the depth of the cavity. ### Claim 15 (depends on 11) The method of claim 11, wherein the process of cutting the wafer and the metal layer from the wafer backside further comprising a step of cutting the wafer and the metal layer from the wafer backside along a straight line overlapping with extensions of two separate scribe line sections detected from the wafer backside. ### Claim 16 (depends on 11) The method of claim 11, wherein the step of cutting the wafer and the metal layer further comprising a step of providing a plurality of first cutting grooves separating each of the multiple chips with a portion of the metal layer located at the backside of each chip; the method further comprising: forming a plastic molding layer covering the metal layer and filling into the first cutting grooves; cutting the plastic molding layer from the wafer backside along a center of each of the first cutting groove forming a second cutting groove within each of the first cutting groove separating each of the multiple chips with a backside plastic package layer formed of a portion of the plastic molding layer covering the metal layer of each chip. ### Claim 17 (depends on 16) The method of claim 16, wherein the support structure comprises plastic molding material and is cut into a plurality of top plastic package layers each located at the front surface of each chip. ### Claim 18 (depends on 16) The method of claim 16, wherein the support structure comprises an adhesive membrane. ### Claim 19 (depends on 16) The method of claim 16, wherein a width of the second cutting grooves is narrower than that of the first cutting grooves, wherein a residue of the plastic molding material in the first cutting grooves covering the sidewalls of the chips. ### Claim 20 (depends on 16) The method of claim 16, wherein a width of the second cutting grooves is the same as that of the first cutting grooves.