# US 8,785,216 B2 · Substrate processing apparatus, substrate processing method, and program for implementing the method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 8,785,216 B2 - Document ID: US8785216B2 - Status: Granted - Kind: B2 - Application number: 13/034,170 - Filed: 2011-02-24 - Published: 2011-06-16 - Granted: 2014-07-22 - Earliest claimed: 2004-03-05 - Assignees: Tokyo Electron Limited - Applicants: Satoshi Yamazaki; Mitsuru Hashimoto - Inventors: Satoshi Yamazaki; Mitsuru Hashimoto - Web page: https://patentgrep.com/patent/US8785216B2 ## CPC - H10P 72/0454: {surrounding a central transfer chamber} - H01J 37/32935: {Monitoring and controlling tubes by information coming from the object and/or discharge} - H10P 72/0456: {in-line arrangement} - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H10P 72/0612: {Production flow monitoring, e.g. for increasing throughput} - H10P 74/23: {characterised by multiple measurements, corrections, marking or sorting processes} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A substrate processing method which is capable of enhancing productivity in manufacturing product substrates. In process chambers of an etching apparatus, etching is carried out on a substrate as an object to be processed, and dummy processing is carried out on at least one non-product substrate before execution of the etching. A host computer determines whether or not the dummy processing is to be executed. The host computer determines whether or not the interior of each of the process chambers and is in a stable state, and omits the execution of the dummy processing when it is determined that it is in the stable state. ## Claims ### Claim 1 A substrate processing method for a substrate processing apparatus, the apparatus including at least one process chamber in which predetermined processing is carried out on a substrate as an object to be processed, the method comprising: a dummy processing step of carrying out dummy processing on a non-product substrate; and a determining step of determining whether or not the dummy processing is to be executed, wherein: said determining step includes a stability determining step of determining whether or not an interior of the process chamber is in a stable state; said dummy processing step includes a dummy processing omitting step of omitting the execution of the dummy processing when it is determined in said stability determining step that the interior of the process chamber is in the stable state; a power applied in a main step, in which processing is carried out at the highest temperature, for the dummy processing to be carried out once is increased to a higher level than a power applied in a main step for the predetermined processing to be carried out on the substrate; when a standing time over which the process chamber is left standing and counting of which is started from a time count start reference time set to an execution end time of the predetermined processing has not exceeded a predetermined time period, it is determined in said stability determining step that the interior of the process chamber is in the stable state; and said predetermined time period is longer than a time interval between successive lot transfers, whereby constant execution of the dummy processing between successive lot transfers can be prevented. ### Claim 2 (depends on 1) A substrate processing method as claimed in claim 1, wherein the determination in said determining step is performed based on preset dummy processing execution requirements or dummy processing non-execution requirements, the dummy processing non-execution requirements including a condition that the standing time does not exceed the predetermined time period. ### Claim 3 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing non-execution requirements include a condition that the non-product substrate does not exist. ### Claim 4 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing non-execution requirements include a condition that execution of the dummy processing on the non-product substrate before execution of the predetermined processing on the substrate is not designated. ### Claim 5 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing execution requirements include a condition that it is configured such that omission of execution of the dummy processing in said dummy processing omitting step is disabled. ### Claim 6 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing execution requirements include a condition that the process chamber is in an off-line state. ### Claim 7 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing execution requirements include a condition that the substrate is a first substrate to be processed after power of the substrate processing apparatus is turned on. ### Claim 8 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing execution requirements include a condition that a substrate processed before the substrate was processed in an off-line state. ### Claim 9 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing execution requirements include a condition that the substrate is a first substrate to be processed after execution of maintenance of the process chamber. ### Claim 10 (depends on 2) A substrate processing method as claimed in claim 2, wherein the dummy processing execution requirements include a condition that abort processing for forcibly terminating processing being executed was executed on a substrate which was being processed immediately before processing of the substrate. ### Claim 11 (depends on 1) A substrate processing method as claimed in claim 1, wherein when it is determined in said stability determining step that the interior of the process chamber is not in the stable state, the dummy processing is carried out once in said dummy processing step. ### Claim 12 (depends on 1) A substrate processing method as claimed in claim 1, wherein processing time of the dummy processing carried out once is longer than processing time of the predetermined processing to be carried out on the substrate. ### Claim 13 (depends on 1) A substrate processing method as claimed in claim 1, wherein said determining step comprises performing determination for each substrate lot including the substrate. ### Claim 14 (depends on 1) A substrate processing method as claimed in claim 1, comprising an abort processing setting step of allowing setting to be made as to whether or not the abort processing is to be executed on the substrate, after abort processing for forcibly terminating processing being executed was executed on a substrate which was being processed immediately before processing of the substrate. ### Claim 15 (depends on 1) A substrate processing method as claimed in claim 1, comprising a log recording step of recording a log indicative of whether or not execution of the dummy processing was omitted. ### Claim 16 A non-transitory computer-readable storage medium storing a program for causing a computer to execute a substrate processing method for a substrate processing apparatus including at least one process chamber in which predetermined processing is carried out on a substrate as an object to be processed, the substrate processing method comprising: a dummy processing step of carrying out dummy processing on a non-product substrate; and a determining step for determining whether or not the dummy processing is to be executed, wherein: said determining step includes a stability determining step of determining whether or not an interior of the process chamber is in a stable state; said dummy processing step includes a dummy processing omitting step of omitting the execution of the dummy processing when said stability determining step determines that the interior of the process chamber is in the stable state; a power applied in a main step, in which processing is carried out at the highest temperature, for the dummy processing to be carried out once is increased to a higher level than a power applied in a main step for the predetermined processing to be carried out on the substrate; when a standing time over which the process chamber is left standing and counting of which is started from a time count start reference time set to an execution end time of the predetermined processing has not exceeded a predetermined time period, it is determined in said stability determining step that the interior of the process chamber is in the stable state; and said predetermined time period is longer than a time interval between successive lot transfers, whereby constant execution of the dummy processing between successive lot transfers can be prevented. ### Claim 17 (depends on 1) A substrate processing method as claimed in claim 1, wherein dry cleaning using a single gas is carried out after execution of the dummy processing.