# US 8,785,034 B2 · Lithium battery, method for manufacturing a lithium battery, integrated circuit and method of manufacturing an integrated circuit

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- Number: US 8,785,034 B2
- Document ID: US8785034B2
- Status: Granted
- Kind: B2
- Application number: 13/300,732
- Filed: 2011-11-21
- Published: 2013-05-23
- Granted: 2014-07-22
- Earliest claimed: 2011-11-21
- Assignees: Infineon Technologies Austria AG; Technische Universitaet Graz
- Applicants: Magdalena Forster; Katharina Schmut; Bernhard Goller; Guenter Zieger; Michael Sorger; Philemon Schweizer; Michael Sternad
- Inventors: Magdalena Forster; Katharina Schmut; Bernhard Goller; Guenter Zieger; Michael Sorger; Philemon Schweizer; Michael Sternad
- Web page: https://patentgrep.com/patent/US8785034B2

## CPC

- H01M 10/0525: Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
- H01M 4/386: {Silicon or alloys based on silicon}
- H01M 4/66: Selection of materials
- H01M 4/70: characterised by shape or form
- H01M 10/0436: {Small-sized flat cells or batteries for portable equipment}
- H01M 10/049: {Processes for forming or storing electrodes in the battery container}
- H01M 10/052: Li-accumulators
- H01M 10/0585: of accumulators having only flat construction elements, i.e. flat positive electrodes, flat negative electrodes and flat separators
- H10D 84/00: Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H01M 6/40: Printed batteries {, e.g. thin film batteries}
- H01M 10/425: {Structural combination with electronic components, e.g. electronic circuits integrated to the outside of the casing (printed circuits H05K1/00)}
- H01M 2220/30: Batteries in portable systems, e.g. mobile phone, laptop
- H01M 2250/30: Fuel cells in portable systems, e.g. mobile phone, laptop
- H10W 72/5363: {the connected ends being wedge-shaped}
- Y02B 90/10: Applications of fuel cells in buildings
- Y02E 60/10: Energy storage using batteries
- Y02E 60/50: Fuel cells
- Y02P 70/50: Manufacturing or production processes characterised by the final manufactured product
- Y10T 29/49108: Electric battery cell making
- Y10T 29/49115: including coating or impregnating
- H01M: PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- Y02B: CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02P: CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A lithium battery includes a cathode, an anode including a component made of silicon, a separator element disposed between the cathode and the anode, an electrolyte, and a substrate. The anode is disposed over the substrate or the anode is integrally formed with the substrate.

## Claims

### Claim 1

A lithium battery, comprising:
a cathode;
an anode comprising a component made of silicon;
a separator element disposed between the cathode and the anode;
an electrolyte; and
a semiconductor substrate, the lithium battery being disposed over the semiconductor substrate or integrally formed with the semiconductor substrate.

### Claim 2 (depends on 1)

The lithium battery according to claim 1, wherein a groove is formed in the semiconductor substrate, and the anode, the separator element and the electrolyte are arranged in the groove.

### Claim 3 (depends on 2)

The lithium battery according to claim 2, wherein the anode forms a wall of the groove.

### Claim 4 (depends on 2)

The lithium battery according to claim 2, wherein the groove comprises sidewalls and a bottom side and the anode forms the bottom side of the groove.

### Claim 5 (depends on 1)

The lithium battery according to claim 1, wherein the anode further comprises a layer including a metal disposed on a side of the anode facing the electrolyte.

### Claim 6 (depends on 1)

The lithium battery according to claim 1, wherein the anode is formed in a layer disposed over the semiconductor substrate and wherein the layer forming the anode completely covers a portion of the semiconductor substrate in which the battery is formed.

### Claim 7 (depends on 1)

The lithium battery according to claim 1, wherein a surface of the semiconductor substrate is patterned.

### Claim 8 (depends on 7)

The lithium battery according to claim 7, wherein a plurality of grooves are formed in the surface of the semiconductor substrate.

### Claim 9 (depends on 8)

The lithium battery according to claim 8, wherein the grooves have a depth of 20 to 100 μm.

### Claim 10

A method of manufacturing a lithium battery, comprising:
forming an anode comprising a component made of silicon on a surface of a semiconductor substrate;
forming a separator element;
forming a cathode so that the separator element is disposed between the cathode and the anode; and
filling an electrolyte in a space formed by the anode, the cathode and the semiconductor substrate.

### Claim 11 (depends on 10)

The method of claim 10, wherein forming an anode comprises patterning a surface of the semiconductor substrate by forming a groove in the semiconductor substrate, a wall of the groove forming the anode.

### Claim 12 (depends on 11)

The method of claim 11, wherein the groove comprises sidewalls and a bottom side and the anode forms the bottom side of the groove.

### Claim 13 (depends on 10)

The method of claim 10, wherein forming an anode comprises patterning a surface of the semiconductor substrate by forming sub-structures in the surface of the semiconductor substrate.

### Claim 14 (depends on 10)

The method of claim 10, further comprising forming a layer including a metal over at least a portion of the semiconductor substrate facing the electrolyte.

### Claim 15

An integrated circuit, comprising:
a circuit element formed in a semiconductor substrate; and
a lithium battery comprising:
an anode comprising a component made of silicon,
wherein the lithium battery is formed in the semiconductor substrate or in a layer over the semiconductor substrate.

### Claim 16 (depends on 15)

The integrated circuit of claim 15, wherein the lithium battery is formed in a semiconductor layer formed over the semiconductor substrate.

### Claim 17 (depends on 15)

The integrated circuit of claim 15, wherein the circuit element is selected from the group consisting of an energy receiving device, an energy emitting device, a signal processing circuit, an information processing circuit, an information storing circuit, a transistor, a capacitor, a resistor, a MEMS (micro-electro-mechanical system) device, a sensor, an actuator, an energy harvester, a device for converting energy, a display device, a video device, an audio device, a music player and components of any of the devices.

### Claim 18

A method of manufacturing an integrated circuit, comprising:
forming a circuit element in a semiconductor substrate; and
forming a lithium battery, wherein forming a lithium battery comprises forming an anode comprising a component made of silicon, wherein the lithium battery is formed in the semiconductor substrate or in a semiconductor layer over the semiconductor substrate.

### Claim 19 (depends on 18)

The method of claim 18, wherein forming the lithium battery further comprises:
forming a separator element;
forming a cathode so that the separator element is disposed between the cathode and the anode; and
filling an electrolyte in a space formed by the anode, the cathode and the semiconductor substrate or semiconductor layer.

### Claim 20 (depends on 18)

The method of claim 18, wherein forming the circuit element and forming the lithium battery comprises common processing steps.

### Claim 21

A method of manufacturing an integrated circuit, comprising:
forming a circuit element in a first semiconductor substrate;
forming a lithium battery, including forming an anode comprising a component made of silicon, the anode being formed in a surface of a second semiconductor substrate; and
packaging the first semiconductor substrate and the second semiconductor substrate in a common housing.

### Claim 22 (depends on 21)

The method of claim 21, wherein the first and second semiconductor substrates are arranged in one layer.

### Claim 23 (depends on 21)

The method of claim 21, wherein the first and second semiconductor substrates are stacked.

### Claim 24

An electronic device comprising:
an electric circuit; and
a lithium battery, the lithium battery comprising:
a cathode;
an anode comprising a component made of silicon;
a separator element disposed between the cathode and the anode;
an electrolyte; and
a substrate, the anode being disposed over the substrate or being integrally formed with the substrate.

### Claim 25 (depends on 24)

The electronic device according to claim 24, wherein the electronic device is selected from the group consisting of a sensor, an actuator, an RFID (radio frequency identification device) tag and a smartcard.

### Claim 26

An electronic device, comprising:
an electric circuit; and
an integrated circuit comprising:
a circuit element formed in a semiconductor substrate; and
a lithium battery comprising:
an anode comprising a component made of silicon,
wherein the lithium battery is formed in the semiconductor substrate or in a layer over the semiconductor substrate.

### Claim 27 (depends on 26)

The electronic device according to claim 26, wherein the electronic device is selected from the group consisting of a sensor, an actuator, an RFID (radio frequency identification device) tag and a smartcard.